Interdigitated back contact (IBC) Si heterojunction solar cell initial performance and stability over time exhibits a critical dependence on the patterning processes, especially in defining the gap structure between emitter and base contacts. Patterning processes using photoresist can result in degradation even with dark storage in a dry environment over days, while other processes using a-SiN X :H for patterning yield stable devices over months. Use of photoresist (PR) as a mask in PECVD to form interdigitated contacts results in a gap that is insufficiently passivated and leads to cell degradation. Use of a-SiN X :H as a mask creates a multi-layer gap structure which improves the cell performance and stability. The laser fired base contact (LFC) reduces V OC slightly due to increased recombination loss, but does not cause additional instability. A stable efficiency of 17.9% was achieved in an IBC-Si heterojunction solar cell using all low temperature processes that incorporated a multi-layer gap passivation structure.Index Terms -cell stability, gap composition, interdigitated back contact, patterning approach, silicon heterojunction solar cell.