Squeeze-film effects in MEMS devices with perforated plates for small amplitude vibration

Abstract

Squeeze-film effects of perforated plates for small amplitude vibration are analyzed through modified Reynolds equation (MRE). The analytical analysis reckons in most important influential factors: compressibility of the air, border effects, and the resistance caused by vertical air flow passing through perforated holes. It is found that consideration of air compressibility is necessary for high operating frequency and small ratio of the plate width to the attenuation length. The analytical results presented in this paper agree with ANSYS simulation results better than that under the air incompressibility assumption. The analytical analysis can be used to estimate the squeeze-film effects causing damping and stiffness added to the system. Since the value of Reynolds number involved in this paper is low (< 1), inertial effects are neglected.

Dynamic behavior of perforated parallel-plate actuator under squeeze film damping effect

“…To reduce squeeze film effects and abbreviate the time needed to release the structure, perforating holes are widely used in MEMS devices (Feng et al 2007). However, the introduction of perforating holes complicates the analysis of the squeeze film damping, for the air flow escaping through perforated holes adds new viscous resistance.…”

Non-linear dynamic instability of a double-sided nano-bridge considering centrifugal force and rarefied gas flow

“…Indeed, if the distance between the moveable electrode and the ground is of the order of few micrometers, the presence of van der Waals and Casimir force can be neglected. The phase portrait of the nano-bridge for 30,…”

“…Guo and Alexeenko [29] proposed a new compact model of squeeze-film damping based on the numerical solution of the Boltzmann kinetic equation. Squeeze-film effects of perforated plates for small amplitude vibration through modified Reynolds equation (MRE) have been analyzed by Feng et al [30]. They found that including the air compressibility is necessary for high operating frequency and small ratio of the plate width to the attenuation length.…”

Compact model for a MEM perforation cell with viscous, spring, and inertial forces

“…However, these models may be sufficient for certain topologies, such as large holes compared to the gap height (Mohite et al 2005). The papers by Kwok et al (2005) and Feng et al (2007), for example, consider compressibility only in the air gap, and Homentcovschi and Miles (2004) consider only the inertia in the air gap region. Reduced-dimension FEM methods that solve the Reynolds equation in a modified form are capable of simulating more complicated geometries and perforations than the compact models (Veijola and Råback 2007;Mehner et al 1998).…”