2008
DOI: 10.1007/s10404-008-0313-5
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Compact model for a MEM perforation cell with viscous, spring, and inertial forces

Abstract: A compact model for calculating damping, inertial, and spring forces in a perforated squeeze-film damper is reported. The repetitive pressure patterns around each perforation are utilized by analyzing the viscoacoustic wave transmission around the hole in a cylindrical volume, called perforation cell. The model is needed in applications where the acoustic wavelength of the oscillation is comparable with the dimensions of the perforation cell. The model is constructed of acoustic impedance twoports. A novel mod… Show more

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Cited by 12 publications
(4 citation statements)
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References 17 publications
(39 reference statements)
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“…especially relevant to the platelike geometries and narrow air gaps associated with capacitive sensing and electrical drive, and squeeze film effects play a significant role in the design of microtorsional mirrors 10 and accelerometers. 11 The effects of squeeze film damping are still under investigation, [12][13][14] most often in the context of mechanical energy loss mechanisms. Squeeze film damping exhibits two distinct regimes, referred to by Bao and Yang 12 as the viscous and elastic damping regimes.…”
mentioning
confidence: 99%
“…especially relevant to the platelike geometries and narrow air gaps associated with capacitive sensing and electrical drive, and squeeze film effects play a significant role in the design of microtorsional mirrors 10 and accelerometers. 11 The effects of squeeze film damping are still under investigation, [12][13][14] most often in the context of mechanical energy loss mechanisms. Squeeze film damping exhibits two distinct regimes, referred to by Bao and Yang 12 as the viscous and elastic damping regimes.…”
mentioning
confidence: 99%
“…Previous studies of SFDs in micro-systems were mostly focused on devices working in a compressible fluid, such as air (Starr 1990;Hosaka et al 1995;Pan et al 1998;Veijola 2004Veijola , 2009Homentcovschi & Miles 2008;Mohite et al 2008;Pandey & Pratap 2008). Since the density of air is small, most of these models do not take into account inertia effects that are negligible.…”
Section: Introductionmentioning
confidence: 99%
“…Fluid inertia is neglected in classical lubrication theory. Existing modified squeeze damper models considering inertia provide complex expressions for the hydrodynamic force without clearly isolating inertia from viscous effects (Veijola 2004(Veijola , 2009Homentcovschi & Miles 2008;Mohite et al 2008). For instance, in Veijola's (2004) work, starting from an integrated form of the Navier-Stokes equations, a compact model considering both the inertia and viscous effect of compressible fluid under rarefied gas conditions was derived.…”
Section: Introductionmentioning
confidence: 99%
“…Similarly, the slide flow is modelled as either a Couette or a Stokes flow [112]. In the slip regime, continuum-based solutions, that include rarefaction effects, have also been reported [214,116]. In the transition regime, the squeeze flow has been simulated with DSMC [215] as well as with the steady-state ES-BGK model [216] while the slide flow has been widely investigated with kinetic models [2].…”
Section: Pressure-driven Velocity Distributionsmentioning
confidence: 99%