Sputter Deposition of Strain Gauges Using ITO/Ag

Gerdes, Holger; Bandorf, Ralf; Heckmann, Ulrike; Schmidt, Volker H.; Kricheldorf, Hans-Ulrich; Bräuer, Günter

doi:10.1002/ppap.200932101

Cited by 17 publications

(10 citation statements)

References 3 publications

(5 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…For high temperature applications up to 1000 °C a nearly compensated TCR with gauge factor exceeding 20 was reported by Gregory et al for Pt-ITO films [3]. First investigations of Me-ITO films with Ag as metal component are published by Gerdes et al [4].…”

Section: Introductionmentioning

confidence: 92%

See 1 more Smart Citation

New materials for sputtered strain gauges

et al. 2009

View full text Add to dashboard Cite

Commercial strain gauges obtain a gauge factor of approximately 2 with a compensated temperature coefficient of resistivity (TCR). Therefore, material development for sputtered thin films with a high gauge factor and negligible TCR was conducted. The object for self compensated sensor materials is the combination of a semiconducting material (negative TCR) with high gauge factor and a metal (positive TCR) leading to a TCR close to zero. With nickel containing diamond-like carbon films (Ni-DLC or a-C:H:Ni) and Ag-ITO compounds zero crossing in TCR and gauge factors higher than 10 were achieved

show abstract

Section: Introductionmentioning

confidence: 92%

“…While first investigations of Me-ITO composite are published on Pt-ITO [3], first steps at Fraunhofer IST were made with Ag-ITO composite [4]. The TCR versus the Ag content in the ITO films is shown in Fig.…”

Section: Me-ito As Sensor Layermentioning

confidence: 99%

New materials for sputtered strain gauges

et al. 2009

View full text Add to dashboard Cite

show abstract

“…Substrates with adequate surfaces could be used for the deposition of thin‐film resistors with high gauge factors and temperature coefficients of resistivity (TCR) close to zero . Suitable thin‐film materials with gauge factors up to 20 are, for example, nickel‐containing diamond‐like carbon and silver‐doped indium tin oxide . In an ideal case, thin‐film structures and necessary contacting elements can directly be deposited on the measurement object, and influences of the sensor support material and the adhesive joint are eliminated.…”

Section: Introductionmentioning

confidence: 99%

Low‐Temperature Co‐Fired Ceramic Substrates for High‐Performance Strain Gauges

Brandt

Gemeinert

Rabe

et al. 2013

Int J Applied Ceramic Tech

View full text Add to dashboard Cite

Recent advances in the development of high gauge factor thin films for strain gauges prompt the research on advanced substrate materials. A glass ceramic composite has been developed in consideration of a high coefficient of thermal expansion (9.4 ppm/K) and a low modulus of elasticity (82 GPa) for the application as support material for thin-film sensors. In the first part, constantan foil strain gauges were fabricated from this material by tape casting, pressure-assisted sintering, and subsequent lamination of the metal foil on the planar ceramic substrates. The accuracy of the assembled load cells corresponds to accuracy class C6. That qualifies the load cells for the use in automatic packaging units and confirms the applicability of the low-temperature co-fired ceramic (LTCC) substrates for fabrication of accurate strain gauges. In the second part, to facilitate the deposition of thin-film sensor structures to the LTCC substrates, pressure-assisted sintering step is modified using smooth setters instead of release tapes, which resulted in fabrication of substrates with low average surface roughness of 50 nm. Titanium thin films deposited on these substrates as test coatings exhibited low surface resistances of 850 Ω comparable to thin films on commercial alumina thin-film substrates with 920 Ω. The presented material design and advances in manufacturing technology are important to promote the development of high-performance thin-film strain gauges. *torsten.rabe@bam.de

show abstract

“…The charge transport in such systems is dominated by tunneling between neighboring metallic nanoparticles, a process that is strongly influenced by correlation effects, such as the Coulomb blockade in the limit of weak intergrain coupling, which has a direct bearing on the conductivity. These fundamental processes can be used for practical applications, since the tunnel coupling has an intrinsically exponential dependence on the inter-grain distance that is altered under strain, therefore making nanogranular metals suitable for strain-sensing applications [ 2 – 5 ].…”

Section: Introductionmentioning

confidence: 99%

A Tunable Strain Sensor Using Nanogranular Metals

Schwalb

Grimm

Baranowski

et al. 2010

Sensors

107

101

View full text Add to dashboard Cite

This paper introduces a new methodology for the fabrication of strain-sensor elements for MEMS and NEMS applications based on the tunneling effect in nano-granular metals. The strain-sensor elements are prepared by the maskless lithography technique of focused electron-beam-induced deposition (FEBID) employing the precursor trimethylmethylcyclopentadienyl platinum [MeCpPt(Me)3]. We use a cantilever-based deflection technique to determine the sensitivity (gauge factor) of the sensor element. We find that its sensitivity depends on the electrical conductivity and can be continuously tuned, either by the thickness of the deposit or by electron-beam irradiation leading to a distinct maximum in the sensitivity. This maximum finds a theoretical rationale in recent advances in the understanding of electronic charge transport in nano-granular metals.

show abstract

Sputter Deposition of Strain Gauges Using ITO/Ag

Cited by 17 publications

References 3 publications

New materials for sputtered strain gauges

New materials for sputtered strain gauges

Low‐Temperature Co‐Fired Ceramic Substrates for High‐Performance Strain Gauges

A Tunable Strain Sensor Using Nanogranular Metals

Contact Info

Product

Resources

About