A Tunable Strain Sensor Using Nanogranular Metals

Schwalb, Christian H.; Grimm, Christina; Baranowski, Markus; Sachser, Roland; Porrati, F.; Reith, Heiko; Das, Pintu; Müller, Jens; Völklein, F.; Kaya, Alexander; Huth, Michael

doi:10.3390/s101109847

Cited by 107 publications

(107 citation statements)

References 24 publications

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“…These metal-carbon combinations have constant gauge factors around 10 up to the percolation limit at about 70 at. %, comparable to Schwalb et al (2010). The gauge factor of the carbon matrix is essentially maintained until gradually more and more conduction paths percolate.…”

Section: Metal Concentration Series For Different Metal-carbon Combinmentioning

confidence: 71%

Granular metal–carbon nanocomposites as piezoresistive sensor films – Part 1: Experimental results and morphology

Schultes¹,

Schmid-Engel²,

Schwebke³

et al. 2018

J. Sens. Sens. Syst.

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Abstract.We have produced granular films based on carbon and different transition metals by means of plasma deposition processes. Some of the films possess an increased strain sensitivity compared to metallic films. They respond to strain almost linearly with gauge factors of up to 30 if strained longitudinally, while in the transverse direction about half of the effect is still measured. In addition, the film's thermal coefficient of resistance is adjustable by the metal concentration. The influence of metal concentration was investigated for the elements Ni, Pd, Fe, Pt, W, and Cr, while the elements Co, Au, Ag, Al, Ti, and Cu were studied briefly. Only Ni and Pd have a pronounced strain sensitivity at 55 ± 5 at. % (atomic percent) of metal, among which Ni-C is far more stable. Two phases are identified by transmission electron microscopy and X-ray diffraction: metal-containing nanocolumns densely packed in a surrounding carbon phase. We differentiate three groups of metals, due to their respective affinity to carbon. It turns out that only nickel has the capability to bond and form a stable and closed encapsulation of GLC around each nanoparticle. In this structure, the electron transport is in part accomplished by tunneling processes across the basal planes of the graphitic encapsulation. Hence, we hold these tunneling processes responsible for the increased gauge factors of Ni-C composites. The other elements are unable to form graphitic encapsulations and thus do not exhibit elevated gauge factors.

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Section: Metal Concentration Series For Different Metal-carbon Combinmentioning

confidence: 71%

Granular metal–carbon nanocomposites as piezoresistive sensor films – Part 1: Experimental results and morphology

Schultes¹,

Schmid-Engel²,

Schwebke³

et al. 2018

J. Sens. Sens. Syst.

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“…This flexibility of the FEBID technique, merged with an enormous downscaling potential [3,4], opens new pathways for various applications such as the development of nano-sensors for magnetic [5,6], strain/ force [1,7], dielectric [8,9] sensing or the possibility to fabricate metallic contact structures with sub-10nm lateral resolution [10]. However, in many cases post-treatment of the as-grown FEBID deposit is inevitable in order to meet the demands for specific applications.…”

Section: Introductionmentioning

confidence: 99%

Identifying the crossover between growth regimes via in-situ conductance measurements in focused electron beam induced deposition

Winhold¹,

Weirich²,

Schwalb³

et al. 2014

Nanofabrication

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Focused electron beam induced deposition presents a promising technique for the fabrication of nanostructures. However, due to the dissociation of mostly organometallic precursor molecules employed for the deposition process, prepared nanostructures contain organic residues leading to rather low conductance of the deposits. Post-growth treatment of the structures by electron irradiation or in reactive atmospheres at elevated temperatures can be applied to purify the samples. Recently, an in-situ conductance optimization process involving evolutionary genetic algorithm techniques has been introduced leading to an increase of conductance by one order of magnitude for tungsten-based deposits using the precursor W(CO)6. This method even allows for the optimization of conductance of nano-structures for which post-growth treatment is not possible or desirable. However, the mechanisms responsible for the observed enhancement have not been studied in depth. In this work, we identified the dwell-time dependent change of conductivity of the samples to be the major contributor to the change of conductance. Specifically, the chemical composition drastically changes with a variation of dwelltime resulting in an increase of the metal content by 15 at% for short dwell-times. The relative change of growth rate amounts to less than 25 % and has a negligible influence on conductance. We anticipate the in-situ genetic algorithm optimization procedure to be of high relevance for new developments regarding binary or ternary systems prepared by focused electron or ion beam induced deposition.

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“…105 and 106. Selected publications pertaining to gas-assisted processing techniques are reported in Table II. In general, beam induced deposition (historically electron and Ga þ ) is capable of highly controlled nanoscale direct-write fabrication and is thus an important technique to consider for various applications including but not limited to rapid prototyping, 107 sensor development, 108 and nanoplasmonics. 109 Ga þ ion beam induced deposits have the disadvantage of gallium staining 110 as well as having limited spatial resolution due to the larger beam size.…”

Section: Gas-assisted Processingmentioning

confidence: 99%

Review Article: Advanced nanoscale patterning and material synthesis with gas field helium and neon ion beams

Stanford

Lewis

Mahady

et al. 2017

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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Focused ion beam nanoscale synthesis has emerged as a critical tool for selected area nanofabrication. Helium and neon ion beams from the gas field ion source have recently demonstrated unparalleled resolution among other scanning ion beams. In this review, the authors focus on the nanoscale synthesis applications for these ion species which have been demonstrated to date. The applications and recent work can broadly be grouped into the following categories: (1) Monte Carlo simulations, (2) direct-write milling or sputtering, (3) ion beam lithography, (4) selective ion implantation or defect introduction, and (5) gas-assisted processing. A special emphasis is given toward using He þ and Ne þ for the processing of two dimensional materials, as several groups have demonstrated promising results. Finally, the authors will discuss the future outlook of He þ and Ne þ nanoprocessing techniques and applications.

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A Tunable Strain Sensor Using Nanogranular Metals

Cited by 107 publications

References 24 publications

Granular metal–carbon nanocomposites as piezoresistive sensor films – Part 1: Experimental results and morphology

Granular metal–carbon nanocomposites as piezoresistive sensor films – Part 1: Experimental results and morphology

Identifying the crossover between growth regimes via in-situ conductance measurements in focused electron beam induced deposition

Review Article: Advanced nanoscale patterning and material synthesis with gas field helium and neon ion beams

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