Some physical properties of nanostructured Al doped ZnO thin films synthesized by RF magnetron sputtering at room temperature

Şenay, Volkan

doi:10.1007/s10854-019-01329-6

Cited by 14 publications

(3 citation statements)

References 49 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…For the same multilayer structure, the maximum global visible transmission occurs when the maximum spectral transmittance is at approximately 550 nm, the wavelength to which the human eye is most sensitive. All materials used in low-e coatings have a refractive index between 1.85 and 2.10 at 550 nm, with the following values reported in different studies: 2.019 for ZnO [68], 2.023 for SiN x [69], 1.85 for AZO [70], 2.00 for SnO 2 [71], and 2.09 for SiAlN x . Dielectric materials with different refractive indexes create different optical paths, and this interference can shift the maximum spectral transmission.…”

Section: Optical Propertiesmentioning

confidence: 99%

Comparison of the Optical Properties of Different Dielectric Materials (SnO2, ZnO, AZO, or SiAlNx) Used in Silver-Based Low-Emissivity Coatings

Cueva,

Carretero

2023

Coatings

View full text Add to dashboard Cite

This work analyzed and compared the optical and photoenergetic properties of low-emissivity coatings made from various dielectric materials deposited through magnetron sputtering following a systematic, comparable method. Different multilayer structures of silver-based low-emissivity coatings were studied using SnO2, ZnO, SiAlNx, and aluminum-doped zinc oxide (AZO, which is inherently a semiconductor, but it fulfils an optical dielectric function in this type of structure). The properties of the coatings were determined by spectrophotometric and sheet resistance measurements. Coatings with AZO as the dielectric layers obtain the best photoenergetic performance because silver growth is more efficient on AZO. We also studied the effect of ion bombardment on AZO and SiAlNx in an attempt to obtain a better low-emissivity coating, achieving better results when etching the dielectric layer with an ion gun. Regarding the structures’ visible transmission, the oxides produced better transmission results. Based on the above, we concluded that AZO had the best optical and photoenergetic properties in our deposition system, observing, in the best-case scenario, improvements in emissivity from 0.083 with SnO2 to 0.058 with AZO and to 0.052 using an ion beam on AZO and improvements in visible transmission from 81.9% with SnO2 to 86.8% with AZO.

show abstract

Section: Optical Propertiesmentioning

confidence: 99%

Comparison of the Optical Properties of Different Dielectric Materials (SnO2, ZnO, AZO, or SiAlNx) Used in Silver-Based Low-Emissivity Coatings

Cueva,

Carretero

2023

Coatings

View full text Add to dashboard Cite

show abstract

“…Various methods such as RF-sputtering [1][2][3][4], sol-gel dip coating [5,6], pulse laser deposition [7,8], and atomic layer deposition [9] have been used to prepare the AZO thin film on both a glass and flexible substrates. Sputtering parameters such as power [10][11][12][13][14][15][16], pressure [11,12], and temperature [14] with substrate temperature [11,17] and substrate roughness [18] were important keys that have been intensively investigated to improve the optical and electrical properties of the AZO films. It has been reported that the working pressure, RF power, and substrate temperature affected the crystallinity and the preferred orientation of the crystallites [11].…”

Section: Introductionmentioning

confidence: 99%

Phase and surface structures-optical transmittance correlation of sputtered Al-doped ZnO film on glass substrate

Niyom,

Rattanasakulthong

2023

Mater. Res. Express

View full text Add to dashboard Cite

The electrical and optical properties of sputtered Al-doped ZnO films prepared on a glass substrate with different thicknesses (97, 127, 161, 211, and 276 nm) were systematically investigated. The 97 nm film showed only the main peak of the AZO (002) phase, whereas the rest films exhibited AZO (002) and (004) phases, and the peak intensities were obviously increased with increasing thickness. The films displayed a granular grain surface and columnar-like structure with different sizes and distributions depending on film thickness.Surface roughness was increased, whereas the electrical resistance was decreased with increasing film thickness. The smallest crystallite size of about 26 nm with the highest resistivity and lowest carrier concentration was observed on a 127 nm film, whereas the crystallite size of about 29 nm was observed on the 97, 161, 211, and 276 nm films. AllAZO films exhibited good electrical properties and transparency with an averaged optical transmittance higher than 80% in the visible wavelength. The 162 nm film showed the highest transmittance of 86% in the wavelength range of 350-900 nm and a wide energy band gap of3.52 eV because of the highest mobility and crystallite size with a columnar structure and random size distribution. The figure of merit (FOM) was strongly related to the optical band gap and tended to increase with increasing thickness. The results are attributed that the optical energy band gap was altered by film thickness by improving phase structure and surface morphology.

show abstract

“…[10] Along with a high optical transparency in the visible range, AZO films have superior electrical conductivity, good thermal and chemical stability. [11] Numerous methods and techniques have been reported to deposit AZO films like chemical vapor deposition (CVD), [12] RF magnetron sputtering, [11,13,14,15] sol-gel method, [16] spray pyrolysis, [17][18][19] and pulsed laser deposition. [20][21][22][23] RF magnetron sputtering is one of the promising methods for the deposition of AZO films because it offers film deposition at lower temperatures as well as a better adhesion than other methods.…”

Section: Introductionmentioning

confidence: 99%

Temperature dependent studies on radio frequency sputtered Al doped ZnO thin film

Bhujbal¹,

Pathan²,

Chaure³

2020

Eng. Sci.

View full text Add to dashboard Cite

In this work, highly conductive and transparent Al: ZnO (Al doped ZnO, i. e., AZO) thin films were grown by radio frequency (RF) magnetron sputtering technique at a typical deposition temperature. The effect of deposition temperature on the structural, morphological, optical and electrical properties was studied. The x-ray diffraction (XRD) studies revealed a hexagonal wurtzite crystal structure for all AZO layers with a (002) preferred orientation along the c-axis. Columnar, compact, uniform grain growth of the layer was observed from atomic force microscopy (AFM) images. The deposition temperature had an influence on the surface roughness and average grain size of deposited films, which could be confirmed by means of AFM images. Optical studies confirmed that both optical band gap energy and urbach energy were influenced by the substrate temperature. Highly transparent films with an energy band gap ranging from 3.48 to 3.65 eV were obtained upon changing the deposition temperature from 22 to 400. The presence of defects was confirmed by ℃ photoluminescence (PL) spectra. A systematic measurement of the electrical parameters like barrier height, and ideality factor of the devices (Ag/Al:ZnO) was carried out with the help of I-V characteristic. This study may be useful for the design and fabrication of AZO based electrodes for solar cell applications.

show abstract

Some physical properties of nanostructured Al doped ZnO thin films synthesized by RF magnetron sputtering at room temperature

Cited by 14 publications

References 49 publications

Comparison of the Optical Properties of Different Dielectric Materials (SnO2, ZnO, AZO, or SiAlNx) Used in Silver-Based Low-Emissivity Coatings

Comparison of the Optical Properties of Different Dielectric Materials (SnO2, ZnO, AZO, or SiAlNx) Used in Silver-Based Low-Emissivity Coatings

Phase and surface structures-optical transmittance correlation of sputtered Al-doped ZnO film on glass substrate

Temperature dependent studies on radio frequency sputtered Al doped ZnO thin film

Contact Info

Product

Resources

About