2018
DOI: 10.1063/1.5020583
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Solving the integration problem of one transistor one memristor architecture with a Bi-layer IGZO film through synchronous process

Abstract: This study demonstrates the integration of a thin film transistor (TFT) and resistive random-access memory (RRAM) to form a one-transistor-one-resistor (1T1R) configuration. With the concept of the current conducting direction in RRAM and TFT, a triple-layer stack design of Pt/InGaZnO/Al2O3 is proposed for both the switching layer of RRAM and the channel layer of TFT. This proposal decreases the complexity of fabrication and the numbers of photomasks required. Also, the robust endurance and stable retention ch… Show more

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Cited by 34 publications
(20 citation statements)
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“…The 1T1R system based on such oxide semiconductors can hardly operate the memristor due to its insufficient driving current. [23,43] The IZO TFT shows high enough I D of 0.1 to 10 mA at V D of 1 V depending on V G ranging from À5 to 10 V, which is sufficiently high to program the resistance of the HfO 2 memristor. Furthermore, the IZO TFT shows a low subthreshold gate swing, an enhancement mode threshold voltage (V th ), and a low off-current (I OFF ) of 0.15 V dec À1 , 0.8 V, and %10 À13 A, respectively.…”
Section: Structural and Electrical Properties Of The 1t1r Pixelmentioning
confidence: 99%
“…The 1T1R system based on such oxide semiconductors can hardly operate the memristor due to its insufficient driving current. [23,43] The IZO TFT shows high enough I D of 0.1 to 10 mA at V D of 1 V depending on V G ranging from À5 to 10 V, which is sufficiently high to program the resistance of the HfO 2 memristor. Furthermore, the IZO TFT shows a low subthreshold gate swing, an enhancement mode threshold voltage (V th ), and a low off-current (I OFF ) of 0.15 V dec À1 , 0.8 V, and %10 À13 A, respectively.…”
Section: Structural and Electrical Properties Of The 1t1r Pixelmentioning
confidence: 99%
“…In industry, the metal oxide composition material InGaZnO 4 (IGZO) was originally proposed for display applications . Due to its high transparency, uniformity, and mobility, IGZO has significant attention for various applications and their related TFT reliability issues . In addition, IGZO has a WBG characteristic of 3.1–3.4 eV, depending on the composition ratio .…”
Section: Comparisons Of the Features Of Many Other Uv Sensing Devicesmentioning
confidence: 99%
“…In order to solve this issue, lots of memory structures were studied widely. First, an extra nonlinear access device was directly connected to each RRAM cell to suppress the sneak path current, such as one-transistor one-resistor (1T1R), [14,15] one-diode one-resistor (1D1R), [16,17] one-selector one-resistor (1S1R). [18,19] Second, complementary resistive switching (CRS) [20,21] was a new resistive memory structure, which performed a symmetrical performance and avoided sneak path current effectively.…”
Section: Doi: 101002/aelm201900756mentioning
confidence: 99%