Area-selective
atomic layer deposition (AS-ALD) is a promising
bottom-up patterning approach for fabricating conformal thin films.
One of the current challenges with respect to AS-ALD is the deficiency
of the surface inhibitor used for fabricating nanoscale three-dimensional
structures. In this study, a vapor-deliverable small inhibitor called
ethanethiol (ET) that thermally adsorbs on surfaces was used for the
AS-ALD of Al2O3. The inhibitor selectively adsorbed
on Co and Cu substrates but not on the SiO2 substrate,
allowing for the selective deactivation of Co and Cu substrates in
Al2O3 ALD. The use of dimethylaluminum isopropoxide
(DMAI) as the Al precursor resulted in better inhibition than the
use of trimethylaluminum (TMA). Various experimental and theoretical
methods, including water contact angle measurements, spectroscopic
ellipsometry, X-ray photoelectron spectroscopy, density functional
theory calculations, and Monte Carlo simulations, were used to elucidate
the process of AS-ALD using ET. Dimerization of the DMAI precursor
is considered to be a governing factor for its high deposition selectivity,
while the probability of this phenomenon is very low for the TMA precursor.
The current study provides insight into the selectivity of AS-ALD
from the perspective of the chemical reaction and an opportunity to
improve selectivity via precursor selection.