2018
DOI: 10.1016/j.ceramint.2018.02.120
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Sol-gel processed high-k aluminum oxide dielectric films for fully solution-processed low-voltage thin-film transistors

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Cited by 27 publications
(20 citation statements)
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“… 2,8 Although polymeric materials, such as polystyrene and polyamide, exhibit excellent mechanical properties, they have disadvantages in terms of low dielectric constants, and the usage of such materials requires high electrical voltage. 9 It is noteworthy that ceramic materials such as barium titanate (BaTiO 3 ) 10 and aluminum oxide (Al 2 O 3 ) 11 possess a high dielectric constant, but their applications in many fields are limited, due to their inherent brittleness and poor processability. 12,13 Therefore, developing ceramic–polymer nanocomposites with a high dielectric constant is a promising method for preparing composite materials with excellent dielectric properties, 14–16 in which ceramic nanoparticles are distributed throughout the polymer matrix.…”
Section: Introductionmentioning
confidence: 99%
“… 2,8 Although polymeric materials, such as polystyrene and polyamide, exhibit excellent mechanical properties, they have disadvantages in terms of low dielectric constants, and the usage of such materials requires high electrical voltage. 9 It is noteworthy that ceramic materials such as barium titanate (BaTiO 3 ) 10 and aluminum oxide (Al 2 O 3 ) 11 possess a high dielectric constant, but their applications in many fields are limited, due to their inherent brittleness and poor processability. 12,13 Therefore, developing ceramic–polymer nanocomposites with a high dielectric constant is a promising method for preparing composite materials with excellent dielectric properties, 14–16 in which ceramic nanoparticles are distributed throughout the polymer matrix.…”
Section: Introductionmentioning
confidence: 99%
“…Nonetheless, they require the use of expensive specialized tools in cleanroom environment and are mainly suitable for the deposition of few nanometers thick films. On the other hand, the sol-gel spin coating route, due to its simplicity and cost-effectiveness, is being progressively explored for large-area device fabrication 45 , including thin film transistors (TFT) 46,47 and nonvolatile resistive memories 3544 .…”
Section: Introductionmentioning
confidence: 99%
“…In Figure 2B, the XRD pattern of the AlO x film, obtained by annealing at the high temperature of 400°C and DUV 80 min, are almost the same; there is no obvious diffraction peak for either sample, so the thin films are amorphous. For dielectric application, the amorphous structure is preferred because the presence of a crystalline structure or grain boundaries may become an alternate leakage current path or increase the surface roughness (Xia et al, 2018). Next, the surface mophology of AlO x thin film is characterized by AFM.…”
Section: Resultsmentioning
confidence: 99%
“…Applying a high-permittivity (high-k) dielectric material allows the achievement of large unit-area capacitance with reasonable thickness that could largely reduce the operating voltage of OFETs while at the same time suppressing the tunneling current. While many high-k materials have been reported for OFET applications, such as AlO x , HfO x , ZrO x , and BST (Wang et al, 2014;Park et al, 2015;Sung et al, 2015;Park et al, 2017;Xia et al, 2018;Yang et al, 2018;Mullapudi et al, 2019;Wang et al, 2019), most of them require vacuum deposition or solution processing at a high annealing temperature.…”
Section: Introductionmentioning
confidence: 99%
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