2019
DOI: 10.1038/s41598-019-46443-x
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Bipolar Cu/HfO2/p++ Si Memristors by Sol-Gel Spin Coating Method and Their Application to Environmental Sensing

Abstract: In this paper, the memristive switching behavior of Cu/ HfO 2 /p ++ Si devices fabricated by an organic-polymer-assisted sol-gel spin-coating method, coupled with post-annealing and shadow-mask metal sputtering steps, is examined. HfO 2 layers of about 190 nm and 80 nm, are established using cost-effective spin-coating method, at deposition speeds of 2000 and 4000 rotations per minute (RPM), respectively. For two types of devices, the memrist… Show more

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Cited by 35 publications
(19 citation statements)
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References 75 publications
(77 reference statements)
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“…For the OxRRAM, the formation and rupture of the filaments is formed by oxygen vacancies within the RRAM device 2527 . CBRAM is also referred to as electrochemical metallization (ECM) memory, relying on the formation/dissolution of metallic filaments inside the switching layer 28–31 . CBRAM shows larger memory window and more power usage effectiveness compared to the OxRAM 32,33 .…”
Section: Introductionmentioning
confidence: 99%
“…For the OxRRAM, the formation and rupture of the filaments is formed by oxygen vacancies within the RRAM device 2527 . CBRAM is also referred to as electrochemical metallization (ECM) memory, relying on the formation/dissolution of metallic filaments inside the switching layer 28–31 . CBRAM shows larger memory window and more power usage effectiveness compared to the OxRAM 32,33 .…”
Section: Introductionmentioning
confidence: 99%
“…Various materials have been proposed for the active layer, such as binary oxides [21][22][23] , perovskite materials [24][25][26][27][28] , and organic materials 29,30 , and these materials exhibit different types of resistive switching mechanism under certain conditions. For instance, Pt/TiO 2 /Pt devices have been found to exhibit unipolar resistive switching behavior 31 , but modulation of the polarity of the electroforming in Pt/TiO 2 /Pt leads to bipolar reset 32 .…”
mentioning
confidence: 99%
“…[ 35,41 ] Several studies using these active electrodes have been reported in solution‐based metal oxide RRAMs. [ 68,123,226,312 ] Cho and co‐workers studied the resistive switching behavior on solution‐based niobium pentoxide (Nb 2 O 5 ) thin films. [ 68 ] The resultant Pt/Nb 2 O 5 /Ag devices presented a unipolar switching, low operating voltage, fast switching speed (100 ns) and ultrahigh resistance window, ≥10 8 .…”
Section: Fundamentals Of Solution‐based Metal Oxide Rramsmentioning
confidence: 99%
“…Another critical parameter on the synthesis process of resistive switching devices is the metal salt precursors, which are subdivided into three counter anions groups; [ 100 ] oxidants (hydrated nitrates), [ 72,79,80,98,101–121 ] reducers (alkoxides, [ 117,122–125 ] acetates, [ 72,76,78,79,104,105,109,111,113–118,126–153 ] and acetylacetonates [ 81,134,144,154–157 ] ), and neutrals (chlorine‐based). [ 63,71,103,107,110,112,116,119,125,132,158–164 ] Among these, oxidant counter ions are preferable due to the high oxidizing power (negative charge), greater solubility in water or polar organic solvents and low decomposition temperature, which are related to the electronic interactions between the metal and the nitrate group, as shown in Figure 9c.…”
Section: Fundamentals Of Solution‐based Metal Oxide Rramsmentioning
confidence: 99%