Soft magnetic properties for Fe-B films sputtered in Ar+N2 plasma.

The change of film microstructure against film thickness is quantitatively examined through the evaluation of magnetic anisotropy including local anisotropy fluctua tion. In Fe-B-N films, selected for this purpose, it is clarified through the evaluation of local anisotropy fluctuation that microstructure of the film drastically changes with decreasing film thickness especially from 0.1~m. Experimental results for film magnetostriction suggest that film structure gradually changes during film preparation, and initial grow structure during film preparation, especially less than 0.05~m in thickness, should consist of grains which are not a-Fe phase.

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“…Fe-B-N films were prepared Table 1 Sputterin condition, annealing condition and intrinsic ohysical quatities. [7] .…”

Section: Methodsmentioning

confidence: 99%

CHANGE OF MICROSCOPICAL ANISOTROPY ON FILM THICKNESS FOR Fe BASED SOFT MAGNETIC FILMS

et al. 1991

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“…Precise fabrication method for each kind of films are listed in the papers of present authors Fe-Si-AI films [5], 81 Ni-Fe-Nb [6] and 55Ni-Fe-Nb [7] films, Fe-N [1,2], Fe-B-N [8], Fe-C-N [9], Fe-Si-N [2], Fe-Si-B-N [10] films and 40Co-Fe-Zr films [3].…”

Section: Experimertal Proceduresmentioning

confidence: 99%

MAGNETOSTRICTION AND MAGNETIC ANISOTROPY FOR Fe BASED SOFT MAGNETIC FILMS

et al. 1991

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Effect of the lattice deformation on soft magnetic properties were examined for the Fe based sputtered films with large magnetocrystalline anisotropy and linear magnetostriction constants. Furthermore, correlations among the film magnetostriction, induced anisotropy and soft magnetic properties are also discussed. Residual lattice strain induces the additional magnetoelastic energy in one grain, and which has a strong correlation to soft magnetic properties through the change of local anisotropy fluctuation, especially for the films of b.c.c. crystal structure. Experimental results suggest that film magnetostriction plays an important role in magnetization process indirectly through the change of macroscopically induced magnetic anisotropy.

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