CHANGE OF MICROSCOPICAL ANISOTROPY ON FILM THICKNESS FOR Fe BASED SOFT MAGNETIC FILMS

Abstract

The change of film microstructure against film thickness is quantitatively examined through the evaluation of magnetic anisotropy including local anisotropy fluctua tion. In Fe-B-N films, selected for this purpose, it is clarified through the evaluation of local anisotropy fluctuation that microstructure of the film drastically changes with decreasing film thickness especially from 0.1~m. Experimental results for film magnetostriction suggest that film structure gradually changes during film preparation, and initial grow structure during film preparation, especially less than 0.05~m in thickness, should consist of grains which are not a-Fe phase.