Soft films on hard substrates — nanoindentation of tungsten films on sapphire substrates

AFM as an alternative for Young’s modulus determination in ceramic materials in elastic deformation regime

“…In the present study, a sapphire sample was used as a reference (E sapphire = 440 GPa, v sapphire = 0.25) [15]. The sample penetration (d) due to F is calculated as (see Fig.…”

Amorphous niobium oxide thin films

“…In this situation there are some controversies about the applicability of the 10% limit. It has been shown that there is an error in the estimation of the contact area because of material pile-up around the indenter, instead of sink-in as assumed in the O-P method [64]. However, it seems that the substrate-effects are observed for penetration depths slightly larger than 10%.…”

Modification of composite hardness models to incorporate indentation size effects in thin films

“…Nanoindentation is an instrumented indentation method, which is commonly used to derive the mechanical properties of both bulk solids and thin films [1][2][3][4]. This method involves the indentation of the material at very low loads and with analysis of the load-displacement curve the properties such as hardness and Young's modulus can be determined.…”