2007
DOI: 10.1016/j.snb.2007.01.004
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SnO2:Sb – A new material for high-temperature MEMS heater applications: Performance and limitations

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Cited by 40 publications
(12 citation statements)
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“…This step reduces the required fabrication time, which takes approximately two hours for each device, limiting this technique in large scale processes [3,5]. This step reduces the required fabrication time, which takes approximately two hours for each device, limiting this technique in large scale processes [3,5].…”
Section: Methodsmentioning
confidence: 99%
“…This step reduces the required fabrication time, which takes approximately two hours for each device, limiting this technique in large scale processes [3,5]. This step reduces the required fabrication time, which takes approximately two hours for each device, limiting this technique in large scale processes [3,5].…”
Section: Methodsmentioning
confidence: 99%
“…The aim in this section is to design a heater with low power consumption and uniform temperature distribution in the active area (capacitor) for a specified range of temperature between 100 and 125 °C. To optimize the issues related to the designing of the heater and in order to achieve the desired temperature in the active area, some issues such as rapid thermal response time (Jung et al 2013), low power consumption (Chung and Jeong 2010), uniform temperature distribution (Khan and Falconi 2013;Velmathi et al 2010), mechanical stability and long life (Byun et al 2014;Spannhake et al 2007) should be considered.…”
Section: The Heatermentioning
confidence: 99%
“…SnO 2 -Sb x O y coatings are used as a working coatings for sensors [1], supercapacitors [4], electrodes in accumulators [2], fuel cells [3], MEMS microheater devices [5], electrochromatic displays, solar cells, and other optoelectronic devices [6]. …”
Section: Introductionmentioning
confidence: 99%