SnO2:Sb – A new material for high-temperature MEMS heater applications: Performance and limitations

Spannhake, Jan; Helwig, Andreas; Müller, Gerhard; Faglia, Guido; Sberveglieri, G.; Doll, Theodor; Wassner, Thomas A.; Eickhoff, Martin

doi:10.1016/j.snb.2007.01.004

Cited by 40 publications

(12 citation statements)

References 23 publications

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“…This step reduces the required fabrication time, which takes approximately two hours for each device, limiting this technique in large scale processes [3,5]. This step reduces the required fabrication time, which takes approximately two hours for each device, limiting this technique in large scale processes [3,5].…”

Section: Methodsmentioning

confidence: 99%

Bottom-up Fabrication of Individual SnO₂ Nanowires-based Gas Sensors on Suspended Micromembranes

Romano‐Rodríguez¹,

Hernández-Ramírez²,

Prades³

et al. 2007

MRS Proc.

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Bottom -up techniques were used to obtain gas sensors based on individual SnO 2 nanowires placed over microhotplates with integrated heaters. These nanowires were electrically connected to pre-patterned microelectrodes by means of Focused Ion Beam (FIB) nanofabrication methodologies. The performance of these sensors, which exhibit reproducible and stable responses, was evaluated as a function of different gas atmospheres and power dissipated by the heater, demonstrating that this technological approach could be used to develop functional devices based on nanomaterials.

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Section: Methodsmentioning

confidence: 99%

Bottom-up Fabrication of Individual SnO₂ Nanowires-based Gas Sensors on Suspended Micromembranes

Romano‐Rodríguez¹,

Hernández-Ramírez²,

Prades³

et al. 2007

MRS Proc.

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“…The aim in this section is to design a heater with low power consumption and uniform temperature distribution in the active area (capacitor) for a specified range of temperature between 100 and 125 °C. To optimize the issues related to the designing of the heater and in order to achieve the desired temperature in the active area, some issues such as rapid thermal response time (Jung et al 2013), low power consumption (Chung and Jeong 2010), uniform temperature distribution (Khan and Falconi 2013;Velmathi et al 2010), mechanical stability and long life (Byun et al 2014;Spannhake et al 2007) should be considered.…”

Section: The Heatermentioning

confidence: 99%

Design a new MEMS tunable capacitors using electro-thermal actuators

et al. 2015

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“…SnO 2 -Sb x O y coatings are used as a working coatings for sensors [1], supercapacitors [4], electrodes in accumulators [2], fuel cells [3], MEMS microheater devices [5], electrochromatic displays, solar cells, and other optoelectronic devices [6]. …”

Section: Introductionmentioning

confidence: 99%

Electrochemical Formation of Multilayer SnO2-Sb x O y Coating in Complex Electrolyte

Maizelis

Bairachniy

2017

Nanoscale Res Lett

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The multilayer antimony-doped tin dioxide coating was obtained by cathodic deposition of multilayer metal-hydroxide coating with near 100-nm thickness layers on the alloy underlayer accompanied by the anodic oxidation of this coating. The potential regions of deposition of tin, antimony, tin-antimony alloy, and mixture of this metals and their hydroxides in the pyrophosphate-tartrate electrolyte were revealed by the cyclic voltammetric method. The possibility of oxidation of cathodic deposit consisting of tin and Sn(II) hydroxide compounds to the hydrated tin dioxide in the same electrolyte was demonstrated.The operations of alloy underlayer deposition and oxidation of multilayer metal-hydroxide coating were proposed to carry out in the diluted pyrophosphate-tartrate electrolyte, similar to the main electrolyte.The accelerated tests showed higher service life of the titanium electrode with multilayer antimony-doped tin dioxide coating compared to both electrode with single-layer electrodeposited coating and the electrode with the coating obtained using prolonged heat treatment step.

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SnO2:Sb – A new material for high-temperature MEMS heater applications: Performance and limitations

Cited by 40 publications

References 23 publications

Bottom-up Fabrication of Individual SnO₂ Nanowires-based Gas Sensors on Suspended Micromembranes

Bottom-up Fabrication of Individual SnO₂ Nanowires-based Gas Sensors on Suspended Micromembranes

Design a new MEMS tunable capacitors using electro-thermal actuators

Electrochemical Formation of Multilayer SnO2-Sb x O y Coating in Complex Electrolyte

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SnO2:Sb – A new material for high-temperature MEMS heater applications: Performance and limitations

Cited by 40 publications

References 23 publications

Bottom-up Fabrication of Individual SnO2 Nanowires-based Gas Sensors on Suspended Micromembranes

Bottom-up Fabrication of Individual SnO2 Nanowires-based Gas Sensors on Suspended Micromembranes

Design a new MEMS tunable capacitors using electro-thermal actuators

Electrochemical Formation of Multilayer SnO2-Sb x O y Coating in Complex Electrolyte

Contact Info

Product

Resources

About

Bottom-up Fabrication of Individual SnO₂ Nanowires-based Gas Sensors on Suspended Micromembranes

Bottom-up Fabrication of Individual SnO₂ Nanowires-based Gas Sensors on Suspended Micromembranes