Bottom-up Fabrication of Individual SnO₂ Nanowires-based Gas Sensors on Suspended Micromembranes

Abstract

Bottom -up techniques were used to obtain gas sensors based on individual SnO 2 nanowires placed over microhotplates with integrated heaters. These nanowires were electrically connected to pre-patterned microelectrodes by means of Focused Ion Beam (FIB) nanofabrication methodologies. The performance of these sensors, which exhibit reproducible and stable responses, was evaluated as a function of different gas atmospheres and power dissipated by the heater, demonstrating that this technological approach could be used to develop functional devices based on nanomaterials.