SiO2/TiO2 thin films with variable refractive index prepared by ion beam induced and plasma enhanced chemical vapor deposition

Optical refractive index and static permittivity of mixed Zr–Si oxide thin films prepared by ion beam induced CVD

“…The choice of these precursors for this study is justified by the fact that ZTB and TrEOS are extensively used in the literature to grow pure silicon oxide, zirconium oxide and zirconium silicates due to their high vapour pressure and general low temperature for synthesis of the mentioned oxides [9,[13][14][15]. The precursors were dosed into the reactor (base pressure ∼ 1 × 10 − 4 Pa) using leak valves with partial pressures in the range between 5 × 10 − 4 and 2 × 10 − 3 Pa. A broad beam ion source (HFQ 1303-3), excited by a RF discharge of Ar/O 2 mixtures (80% Ar and 20% O 2 regarding relative partial pressures) at about 1 × 10 − 1 Pa, was used to supply bombarding ions with 400 eV.…”

“…It is known that the use of ion beams to assist the deposition of this kind of films leads to the formation of compact and smooth thin films [5]. This method has been previously used to produce the single SiO 2 [10,11] and ZrO 2 [12] oxides and other mixed oxide as titanium aluminates [7,8] or titanium silicates [9].…”

Open air plasma deposited antimicrobial SiOx/TiOx composite films for biomedical applications

“…Sol-Gel process [6][7][8] and plasmaenhanced chemical vapour deposition (PE-CVD) [9]. The Sol-Gel process is a wet chemical process and the PE-CVD is commonly performed under vacuum.…”

Optical Properties of (AR) Multilayer Thin Film for Solar Cell Application

“…Metal oxide nanoparticles may potentially be inexpensive alternatives to carbon nanotubes with superior properties for many applications including catalysis, separation, gas storage, energy conversion, drug release, sensing and environmental protection, and biocompatible nanocomposites. The modified form of TiO 2 composites such as TiO 2 -SiO 2 , TiO 2 /SiO 2 are interest for their potential application, such as electrolytes in dye-sensitized solar cells, anti reflection coating, photocatalysts and so on [1][2][3][4][5][6][7].…”