Single-Crystal Silicon Based Electrothermal MEMS Mirrors for Biomedical Imaging Applications

Xie, Huikai; Todd, Shane; Jain, Ankur; Fedder, Gary K.

doi:10.1007/0-387-25786-1_36

Cited by 10 publications

(11 citation statements)

References 48 publications

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“…To address this, the ISC design must be optimized. To that end, the following equation shows angular responsivity γ in a single bimorph, which can be utilized as an approximate guideline for design constraints [21].…”

Section: Actuator Bimorph Design and Optimizationmentioning

confidence: 99%

A Large Piston Displacement MEMS Mirror With Electrothermal Ladder Actuator Arrays for Ultra-Low Tilt Applications

Samuelson

Xie

2014

J. Microelectromech. Syst.

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A large displacement piston motion micromirror is designed, fabricated, and tested with device features tuned to applications requiring ultralow tilt. The fabricated MEMS mirror is based on electrothermal actuation and has a footprint of 1.9mm × 1.9mm with a mirror aperture of 1 mm. The application optimized device holds key features of ultralow maximum tilt of 0.25°and a strongly linear motion of 90 µm achievable at only 1.2 V. This device is further characterized in an interferometric system to determine the piston mode and the accurate piston displacement as a function of voltage, power, and frequency.[ 2013-0112]Index Terms-Bimorph, microelectromechanical systems (MEMS), vertical displacement, piston.

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Section: Actuator Bimorph Design and Optimizationmentioning

confidence: 99%

A Large Piston Displacement MEMS Mirror With Electrothermal Ladder Actuator Arrays for Ultra-Low Tilt Applications

Samuelson

Xie

2014

J. Microelectromech. Syst.

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“…When the temperature increases, the bimorph bends towards the material with lower TEC ( Figure 6 b). In Figure 6 c, for a small angle, if the widths of the two materials are equal, the tip deflection, d f , of the bimorph is given by [ 34 , 35 ]:

where l b is the length of the bimorph, a 1 and a 2 are the TECs of material 1 and material 2, respectively. Δ T is the temperature change, r is the radius of curvature of the bimorph caused by Δ T , θ T is the angle of curvature, and E 1 and E 2 are the Young’s moduli of material 1 and material 2, respectively.…”

Section: Electrothermal Action Mechanismsmentioning

confidence: 99%

Review of Electrothermal Micromirrors

Tang

et al. 2022

Micromachines

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Electrothermal micromirrors have become an important type of micromirrors due to their large angular scanning range and large linear motion. Typically, electrothermal micromirrors do not have a torsional bar, so they can easily generate linear motion. In this paper, electrothermal micromirrors based on different thermal actuators are reviewed, and also the mechanisms of those actuators are analyzed, including U-shape, chevron, thermo-pneumatic, thermo-capillary and thermal bimorph-based actuation. Special attention is given to bimorph based-electrothermal micromirrors due to their versatility in tip-tilt-piston motion. The exemplified applications of each type of electrothermal micromirrors are also presented. Moreover, electrothermal micromirrors integrated with electromagnetic or electrostatic actuators are introduced.

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“…Optimization of this design begins with addressing the need to reduce tilt. To address this, the following equation shows angular responsivity γ in a single bimorph, which can be utilized as an approximate guideline for design constraints [11].…”

Section: Actuator Optimizationmentioning

confidence: 99%

A Large Piston Displacement Mems Mirror With Electrothermal Ladder Actuator Arrays for Fourier Transform Spectroscopy Applications

Samuelson¹,

Xie²

2012

2012 Solid-State, Actuators, and Microsystems Workshop Technical Digest

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A large displacement piston motion micromirror is designed, fabricated and tested with device features tuned to application in a hand-portable Fourier Transform Spectroscopy (FTS) system. The fabricated MEMS mirror is based on electrothermal actuation and has a footprint of 1.91.90.5mm 3 with a mirror aperture of 1.02mm. The application optimized device holds key features of ultralow maximum tilt of 0.25°, a large, strongly linear motion of 90µm achievable at only 1.2V dc and a maximum theoretical spectral resolution of 55.6cm -1 .This device is further characterized with pertinent characteristics for applicability to rapid scan FTS system configurations.

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Single-Crystal Silicon Based Electrothermal MEMS Mirrors for Biomedical Imaging Applications

Cited by 10 publications

References 48 publications

A Large Piston Displacement MEMS Mirror With Electrothermal Ladder Actuator Arrays for Ultra-Low Tilt Applications

A Large Piston Displacement MEMS Mirror With Electrothermal Ladder Actuator Arrays for Ultra-Low Tilt Applications

Review of Electrothermal Micromirrors

A Large Piston Displacement Mems Mirror With Electrothermal Ladder Actuator Arrays for Fourier Transform Spectroscopy Applications

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