A Large Piston Displacement Mems Mirror With Electrothermal Ladder Actuator Arrays for Fourier Transform Spectroscopy Applications

Abstract

A large displacement piston motion micromirror is designed, fabricated and tested with device features tuned to application in a hand-portable Fourier Transform Spectroscopy (FTS) system. The fabricated MEMS mirror is based on electrothermal actuation and has a footprint of 1.91.90.5mm 3 with a mirror aperture of 1.02mm. The application optimized device holds key features of ultralow maximum tilt of 0.25°, a large, strongly linear motion of 90µm achievable at only 1.2V dc and a maximum theoretical spectral resolution of 55.6cm -1 .This device is further characterized with pertinent characteristics for applicability to rapid scan FTS system configurations.

A Large Piston Displacement MEMS Mirror With Electrothermal Ladder Actuator Arrays for Ultra-Low Tilt Applications

“…The intent is to optimize the design for use in ultralow tilt applications while retaining large piston displacement capability. Some preliminary results were reported in [16]. This work carries over the goals of the prior work to create a system that is compact, portable and of low cost such that it may be employed in areas such as chemical analysis and biohazard detection as an FTS system is well suited [9].…”