Simultaneous measurements of X-ray reflectivity and grazing incidence fluorescence at BL-16 beamline of Indus-2

Abstract

A new multipurpose x-ray reflectometer station has been developed and augmented at the microfocus beamline (BL-16) of Indus-2 synchrotron radiation source to facilitate synchronous measurements of specular x-ray reflectivity and grazing incidence x-ray fluorescence emission from thin layered structures. The design and various salient features of the x-ray reflectometer are discussed. The performance of the reflectometer has been evaluated by analyzing several thin layered structures having different surface interface properties. The results reveal in-depth information for precise determination of surface and interface properties of thin layered materials demonstrating the immense potential of the combined measurements of x-ray reflectivity and grazing incidence fluorescence on a single reflectometer.

Sub-nanograin metal based high efficiency multilayer reflective optics for high energies

“…XRR measurements were performed using BL-16 of Indus-2 synchrotron radiation. 33 XRR measurements were carried out in s-polarized geometry with an angular step size of 0.005° and are carried out up to a very large incident angle of θ = 6° to access microstructural parameters of MLs more precisely through data fitting. The reliable structural parameters are ensured by simultaneous data fitting of measured curves at different photon energies from 10 to 20 keV.…”

Depth-resolved chemical speciation of a W-B4C multilayer structure

“…The multilayer sample was deposited using Argon, as a sputtering gas medium at constant pressure of ∼ 5×10 −3 mbar, whereas the base vacuum of the chamber was maintained at ∼ 2×10 −8 mbar before the start of the deposition process. The combined x-ray reflectivity and grazing incidence x-ray fluorescence measurements for W-B 4 C multilayer consisting of 15 bilayer repetitions were carried out at the x-ray reflectometer station of BL-16 beamline of Indus-2 synchrotron facility at incident x-rays energy of 10230 eV, monochromatized using a Si (111) double crystal monochromator [29]. The XSW assisted depth resolved XANES measurements at W-L 3 absorption edge energy (E o ∼ 10207 eV) for W-B 4 C multilayer of 15 bilayer repetitions was performed at the same reflectometer station.…”

“…Fluorescence x-rays were measured through a Al pinhole collimator of diameter ∼ 1 mm to maintain a constant solid angle of the SDD detector on the sample surface [31]. The details about the BL-16 reflectometer station are described elsewhere [29,32]. We have also carried out the XSW-XANES measurements for a W-B 4 C multilayer consisting of N=10 bilayer repetitions at the International Atomic Energy Agency (IAEA) GIXRF-XRR experimental facility operated at the XRF beamline of Elettra Sincrotrone Trieste (BL-10.1L).…”

Surface and interface characterization of Ru/C/Ru trilayer structure using grazing incidence X‐ray reflectivity and X‐ray fluorescence

“…The deposited samples were characterized using XRR and GIXRF techniques. The measurements were carried out at X-ray Fluorescence Microprobe beamline (BL-16) 25 at Indus-2 synchrotron source at 10-keV incident energy. A double crystal monochromator is used to provide monochromatic photons in energy range 4-20 keV with energy resolution ΔE/E$10 À4 .…”