“…The neutron conversion materials are usually 10 B or 6 LiF solids, while the SiC diode detectors are usually composed of front ohmic contact electrode solids, SiC material solids, and back ohmic contact electrode solids [7], [20], [38]. In actual manufacturing, the front p-type ohmic contact electrode of the SiC diode was usually made of Ti with a thickness of 30 nm and Al with a thickness of 100 nm, and the backside n-type ohmic contact electrode was usually made of Ni with a thickness of 150 nm [41], [42], [43], [44], [45]. Also, the surface area of the SiC neutron detector was 1 × 1 cm 2 [9], [10], [15].…”