Simulation and analysis of actuation voltage of electrostatically actuated RF MEMS cantilever switch

Saba, Norshahida; Soin, Norhayati; Khamil, Khairun Nisa

doi:10.1109/icssa.2015.7322520

Cited by 5 publications

(2 citation statements)

References 4 publications

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“…The actuation technique is a term given to the mechanism that transforms the input energy into a microstructure motion. There are different principles and approaches to actuate MEMS devices [7,[50][51][52][53][54][55], the most important of which include: electrostatic actuation [56][57][58][59][60][61][62][63][64], electrothermal actuation [4,44,[65][66][67][68], electromagnetic actuation [7,69], and piezoelectric actuation [48,70] (Fig. 2).…”

Section: Actuation Techniquesmentioning

confidence: 99%

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

et al. 2021

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Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable. MEMS exhibits excellent feasibility in miniaturization sensors due to its small dimension, low power consumption, superior performance, and, batch-fabrication. This article presents the recent developments in standard actuation and sensing mechanisms that can serve MEMS-based devices, which is expected to revolutionize almost many product categories in the current era. The featured principles of actuating, sensing mechanisms and real-life applications have also been discussed. Proper understanding of the actuating and sensing mechanisms for the MEMS-based devices can play a vital role in effective selection for novel and complex application design.

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Section: Actuation Techniquesmentioning

confidence: 99%

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

et al. 2021

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“…The simulation and analysis of a RF MEMS cantilever switch designed to operate at low actuation voltage is presented in [7]. The study of electrostatically actuated RF MEMS cantilever switch discusses how crucial it is to comprehend the actuation voltage specifications for RF MEMS switches in the context of wireless communication systems and optimization of switch design [8]. Calculation of the pull-in voltage for micro-cantilevers with different shapes and a thorough analysis and calculation approach for the pull-in voltage of micro cantilevers with different geometries is studied in [9].…”

Section: Introductionmentioning

confidence: 99%

Mathematical Modelling of Electrostatically Actuated Cantilever Beams

SRE,

P.A.

2023

Preprint

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This study presents a mathematical model for an electrostatically actuated cantilever beam using COMSOL Multiphysics and Wolfram Mathematica. The model is used to investigate the pull-in voltage phenomenon, which refers to the voltage required to pull the beam to touch the bottom electrode. The cantilever beam is modeled as a micro-electromechanical system (MEMS) structure and is electrostatically actuated by applying a voltage between the beam and the bottom electrode. The model takes into account the electrostatic forces and the mechanical deflection of the beam. Parametric analysis is performed using COMSOL Multiphysics and then Wolfram Mathematica tool is used to validate the results obtained from the simulations. The mathematical model is developed using Galerkin's method. This study provides insights into the design and optimization of MEMS devices for various applications such as sensors and actuators.

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Determination of the stiffness properties of a complex RF MEMS by superposition and finite elements method

Yilmaz

Orhan

2019

Microsyst Technol

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Simulation and analysis of actuation voltage of electrostatically actuated RF MEMS cantilever switch

Cited by 5 publications

References 4 publications

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

Mathematical Modelling of Electrostatically Actuated Cantilever Beams

Determination of the stiffness properties of a complex RF MEMS by superposition and finite elements method

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