Silicon sensors for automotive applications

Sulouff, R.E.

doi:10.1109/sensor.1991.148830

Cited by 9 publications

(3 citation statements)

References 16 publications

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“…MEMS accelerometers are most widely known for their applications in safety systems or airbags (Sulouff 1991). The deceleration of a vehicle can be sensed throughout the car, but due to the deformation that occurs during an impact, it is possible to have a large deceleration in the initial impact zone and very little change in velocity at the passenger location.…”

Section: Automotive Marketsmentioning

confidence: 99%

Accelerometers

Xie

Fedder

Sulouff

2008

Comprehensive Microsystems

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Section: Automotive Marketsmentioning

confidence: 99%

Accelerometers

Xie

Fedder

Sulouff

2008

Comprehensive Microsystems

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“…In the field of sensors, MEMS-based accelerometers have a significant name. As they are used to trigger other sensors in automobiles, accelerometers are widely utilized in the automotive sector [4][5]. It is specifically employed in vehicle airbag deployment.…”

Section: Introductionmentioning

confidence: 99%

Design and performance analysis of a MEMS Based Area-Variation Capacitive Accelerometer with Readout Circuit

Raha Patra,

Biswas

2024

JICS

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The structural optimization of the device is used in the present work to demonstrate the improvement of the device sensitivity for a MEMS accelerometer based on capacitive principle due to overlap area change between electrodes. The proof mass of the device is made up of a few parallel fingers those are joined together. Proof mass is supported by flexible mechanical beams that resemble springs is suspended over fixed electrodes and are fastened to the substrate. The greatest displacement that the proof mass can suffer with application of acceleration is determined for the specific construction. The connected beams' width and length were changed, and ANSYS FEA software was used to model the reaction. Sensitivity of the device is analyzed and discussed based on the findings of various device geometry measurements, and suggestions for improving sensitivity are also made. Additionally, a signal conditioning circuit that changes the capacitance to voltage as a result of the proof mass deflecting differently is described. These discoveries might help designers to create capacitive MEMS accelerometers with increased sensitivity.

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“…Fig.5.5 graphs are shown of the error function as given in(5)(6)(7)(8)(9)(10)(11)(12)(13)(14)(15)(16)(17)(18)(19)(20)(21)(22). From these results it can be concluded that for most values of the parameters the fluid can be treated as being incompressible.…”

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confidence: 99%

Micro-machined high capacity silicon load cells

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Silicon sensors for automotive applications

Cited by 9 publications

References 16 publications

Accelerometers

Accelerometers

Design and performance analysis of a MEMS Based Area-Variation Capacitive Accelerometer with Readout Circuit

Micro-machined high capacity silicon load cells

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