Micro-machined high capacity silicon load cells

,; Zwijze, A.F.

doi:10.3990/1.9789036515078

DOI: 10.3990/1.9789036515078

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Micro-machined high capacity silicon load cells

A.F. Zwijze

Abstract: MICRO-MACHINED HIGH CAPACITY SILICON LOAD CELLSPROEFSCHRIFT ter verkrijging van de graad van doctor aan de Universiteit Twente, op gezag van de rector magnificus, prof.dr. F.A. van Vught, volgens besluit van het College voor Promoties in het openbaar te verdedigen op vrijdag 27 oktober 2000 te 13.15 uur.

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Micro-machined high capacity silicon load cells

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