Silicon Sensors And Microstructures

Bryzek, Janusz

doi:10.1109/electr.1991.718293

Cited by 30 publications

(27 citation statements)

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“…The software part can be further developed, such that the calibration cycle becomes more automated with minimum interference from the part of the user. In this way, the resulting smart sensor setup with the microcontroller makes a fast, automated, and thus cheap calibration of sensors in production possible, and also provides for fast and cheap customer recalibration [2]. Furthermore, since the smart sensor has all the calibration facilities on board, a minimum attention per sensor is needed, namely the reference data can be sent to many sensors at a time in a batch calibration process.…”

Section: Discussionmentioning

confidence: 99%

“…For smart sensors, calibration methods can be applied to the analog part or the digital part of the sensor signalprocessing chain [1]. Analog calibration methods are based on changing the analog signal transfer in such a way as to compensate for the sensor errors, mostly through the use of trimmable resistors [2]- [4]. A second class of calibration methods within this group [5] comprises those methods where the transfer of the analog signal processing circuit is controlled and modified by a digitally programmable array of resistors or capacitors.…”

Section: Introductionmentioning

confidence: 99%

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A noniterative polynomial 2-D calibration method implemented in a microcontroller

Lyahou

Horn

Huijsing

1997

IEEE Trans. Instrum. Meas.

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Abstract-Output signal handling of a smart sensor usually involves a calibration facility to correct for input-output nonidealities which comprise offset, gain errors, nonlinearity errors, and cross sensitivity. In this paper, a calibration method is presented which features a progressive improvement in the sensor calibrated transfer toward the desired transfer as the user proceeds from one calibration point to the next. The method is based on a set of mathematical formulas whereby a calibration coefficient is calculated at a selected calibration point and used to calculate a first correction of the sensor transfer curve. Further improvement in the sensor transfer is obtained by repeating the process for a second calibration point using the transfer resulting from the first calibration, without the need to review the calibration already carried out at the first point. The process can be repeated until the desired error reduction is obtained.Step by step, the calibration method builds up a polynomial transfer correction. Simulation results are shown to demonstrate the performance of the method. A software implementation of the method for two-dimensional (2-D) calibration in an 8-bit microcontroller is presented. The microcontroller with calibration program can be incorporated in a compact smart sensor system.

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Section: Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A noniterative polynomial 2-D calibration method implemented in a microcontroller

Lyahou

Horn

Huijsing

1997

IEEE Trans. Instrum. Meas.

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“…Moreover, probably the most quoted paper in MEMS, 'Silicon as a mechanical material,' was published in 1982 [2] with a thorough review of silicon bulk micromachining and MEMS devices such as inkjet nozzle, light modulators, gas chromatography device, chip-sized optical bench, thermal print head, etc. Interestingly, however, many people believe that the MEMS effort in this period was actually sustained by the success of miniature silicon pressure sensors [73] . Then, a resurgence of interest in MEMS devices arose in the 80's that has since led to a burgeoning new field of research and industrial development.…”

Section: The Beginning Of Mechanical Miniaturizationmentioning

confidence: 99%

Introduction to MEMS

Tai

2012

Microsystems and Nanotechnology

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The first research on MEMS can be traced all the way back to the 50's [1] . In the 80's, there was a burst of MEMS using semiconductor materials. In the 90's, MEMS was formally an emerging technology. Today, MEMS has grown to be a big field with hectic international competition on many commercial applications. Without doubt, MEMS is already ubiquitous, but various new MEMS devices are continuing to show up. There is no end in sight as we continue to see MEMS branch into new fields and applications. At the same time, though, there is still much to do with both science and technology issues because of its 'multidisciplinary' and 'system' nature. MEMS is becoming more exciting than ever considering its bright long-term prospects going into BioMEMS and NEMS. There is no doubt that MEMS will be a key factor for bridging our world into nanotechnology. The best day for MEMS is yet to come with a continuous drive to make our life smaller, cheaper, and better.

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“…Favorable piezoresistors arrangement is the Wheatstone bridge with four active piezoresistors, [1][2][3]. Static and dynamic changes of the stress field (magnitude and direction of vector), which are related to the external mechanical influence (force, deflection), change resistivity of each individual piezoresistor.…”

Section: Introductionmentioning

confidence: 99%