2011
DOI: 10.4236/msa.2011.26078
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Nanosensitive Silicon Microprobes for Mechanical Detection and Measurements

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Cited by 3 publications
(2 citation statements)
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“…5) were developed and successfully tested. Nanosensitive mechanical microprobes with CMOS transistors, inverters, inverter cascades and ring oscillators were presented by Łysko et al [49]. As some of developed transistors were located in the area of the highest tension of the probes, the piezoresistive effect caused the changes of the resistance of the channels.…”
Section: The Probe's Deflection Detection Systemsmentioning
confidence: 99%
“…5) were developed and successfully tested. Nanosensitive mechanical microprobes with CMOS transistors, inverters, inverter cascades and ring oscillators were presented by Łysko et al [49]. As some of developed transistors were located in the area of the highest tension of the probes, the piezoresistive effect caused the changes of the resistance of the channels.…”
Section: The Probe's Deflection Detection Systemsmentioning
confidence: 99%
“…At present, the standard methods of the nanometer-scale detection of strain are based on micrometer size silicon piezoresistors or MOS transistors with piezoresistive channels [49]. Recently, a strain sensor based on commensurate-incommensurate phase transition in the double-walled CNTs was proposed [2].…”
Section: Strain Sensor Based On Zigzag Cntmentioning
confidence: 99%