Fabrication and characterization of electromagnetically actuated microcantilevers for biochemical sensing, parallel AFM and nanomanipulation

Nieradka, Konrad; Kopiec, Daniel; MałOzić, Grzegorz; Kowalska, Z.; Grabiec, P.; Janus, P.; Sierakowski, Andrzej; Domanski, K.; Gotszalk, Teodor

doi:10.1016/j.mee.2012.06.019

Cited by 26 publications

(22 citation statements)

References 7 publications

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“…The electromagnetically actuated array cantilevers were fabricated from monocrystalline silicon using a double-side micromachining technique [7]. Their length was 500 /lm, width 100 /lm, and thickness ranged from 1 /lm to 3.5 /lm throughout the wafer.…”

Section: Methodsmentioning

confidence: 99%

“…If the direction of the magnetic induction vector is parallel to the cantilever longitudinal axis, than the Lorentz force acts on the cantilever in the direction of z-axis ( fig. 2) [7]. The Lorentz force (for the homogenous magnetic field) is given by the equation: Fe r = IwB , where I is the applied current, B is the magnetic field and w is the width of the Lorentz loop.…”

Section: Methodsmentioning

confidence: 99%

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Fabrication and metrology of electromagnetically actuated microcantilever arrays for biochemical sensing

Gotszalk

Nieradka

Kopiec

et al. 2012

2012 12th IEEE International Conference on Nanotechnology (IEEE-NANO)

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Since their first applications in atomic force microscopy (AFM) micro-and nanocantilevers have been using as a very versatile tool for nanotechnology for over two decades.Their applications cover fields of micro-and nanomanipulation, micro-and nanocalorimetry, force and mass sensing. Variety of methods and techniques for actuation and detection of cantilevers' motion have been proposed and widely used, each exhibiting its advantages and drawbacks. In this paper we present architecture of the microcantilever whose deflection is actuated electromagnetically by the Lorentz force. Optical beam deflection (OBD) method was used to observe the beam static and resonance displacement. We also present characteristics of the proposed system and describe numerous applications in modern biochemical diagnostics. These include biosensing, mass change detection, nanometer range manipulation and force measurements with the resolution of several piconewtons. In the presented experiments an array of rectangular silicon cantilevers fabricated using double side micromachining was used. A layer of gold was deposited on the top side of the microcantilevers creating a current line for actuation, a reflective pad at the apex, and a substrate for thiol-based self-assembled monolayers (SAMs).

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Section: Methodsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Fabrication and metrology of electromagnetically actuated microcantilever arrays for biochemical sensing

Gotszalk

Nieradka

Kopiec

et al. 2012

2012 12th IEEE International Conference on Nanotechnology (IEEE-NANO)

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“…When an electromagnetical cantilever is electrically biased and when it is immersed in the magnetic field, electromagnetic force induces structure deflection [7].…”

Section: Introductionmentioning

confidence: 99%

Optimal design of electromagnetically actuated MEMS cantilevers

Barba¹,

Gotszalk²,

Majstrzyk³

et al. 2018

Preprint

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In this paper we present the numerical and experimental results of a design optimization of electromagnetic cantilevers. In particular, a cost-effective technique of evolutionary computing enabling the simultaneous minimization of multiple criteria is applied. A set of optimal solutions are subsequently fabricated and measured. The designed structures are fabricated in arrays, which makes the comparison and measurements of the sensor properties reliable. The microfabrication process, based on the silicon on insulator (SOI) technology, is proposed in order to minimize parasitic phenomena and enable efficient electromagnetic actuation. Measurements on the fabricated prototypes assessed the proposed methodological approach.

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“…The commonly used methods are an optical beam deflection (OBD) [3] and electric detection of deflection (tunneling, capacitance, piezoelectric and piezoresistive) [4]. Each method has its advantages and drawbacks.…”

Section: Introductionmentioning

confidence: 99%

Dynamic method of calibration and examination piezoresistive cantilevers

et al. 2013

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In this paper authors present two methods of determining the cantilever displacement sensitivity. In both cases the cantilevers are examined in dynamic condition for cantilever vibrating with frequency range close to resonance frequency. One of the method uses as measurement tool a white light interferometer, the another one uses the laser interferometric vibrometer. For adequate comparing methods, obtained results refer to the same cantilever with piezoresistive Wheatstone bridge. In this paper authors also present the fabrication process of piezoresistive cantilevers with planar tip adapted for working in a shear force [1]. Additionally the piezoresistive circuit characterization by impedance spectroscopy is presented. Finally the spring constant is determined basing on frequency response of the cantilever measured from thermal noise density [2]. Basing on obtained results authors made a conclusion that both methods can be successfully used for accurate characterization piazoresistive cantilevers work in a non-contact resonance mode.

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Fabrication and characterization of electromagnetically actuated microcantilevers for biochemical sensing, parallel AFM and nanomanipulation

Cited by 26 publications

References 7 publications

Fabrication and metrology of electromagnetically actuated microcantilever arrays for biochemical sensing

Fabrication and metrology of electromagnetically actuated microcantilever arrays for biochemical sensing

Optimal design of electromagnetically actuated MEMS cantilevers

Dynamic method of calibration and examination piezoresistive cantilevers

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