Silicon Bulk Micromachined Vibratory Gyroscope

Tang, Tony K.; Gutierrez, Roman C.; Wilcox, J. Z.; Stell, Christopher B.; Vorpérian, V.; Calvet, Robert J.; Li, W. J.; Charkaborty, Indrani; Bartman, Randall K.; Kaiser, William J.

doi:10.31438/trf.hh1996.65

Cited by 28 publications

(11 citation statements)

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“…The excitations of the sensor's lightly damped modes can be accomplished by applying a potential to the driving electrodes directly from a function generator or digital-to-analog converter (DAC) and the subsequent response is measured by converting the charge on the sense electrodes into a buffered output voltage that is proportional to the rate of change of the gap between the electrodes and the cloverleaf. More detailed information on the design and fabrication of the sensors is provided in [18].…”

Section: A Sensor Descriptionmentioning

confidence: 99%

A systematic method for tuning the dynamics of electrostatically actuated vibratory gyros

Kim

M’Closkey

2006

IEEE Trans. Contr. Syst. Technol.

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Section: A Sensor Descriptionmentioning

confidence: 99%

A systematic method for tuning the dynamics of electrostatically actuated vibratory gyros

Kim

M’Closkey

2006

IEEE Trans. Contr. Syst. Technol.

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“…Inspection of (7) shows that the outputs are symmetric in the mistuning factor and that the sets G i Y i and G q Y q determine the dependence on the frequency parameter #. Figures 7 and 8 show Bode plots of G i and G q for a typical value of $ 2 and for dierent values of mistuning .…”

Section: Tuned Gyromentioning

confidence: 99%

The dynamics of a vibrating silicon diaphragm microgyroscope

Burdess

Harris

Wood

et al. 2000

Proceedings of the Institution of Mechanical Engineers, Part C:

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This paper describes the principal features of a microgyroscope bulk machined from a [100] silicon wafer by chemical etching. The equations of motion of the gyroscope are derived and the factors that determine both the mechanical and electrical characteristics of the device are identi®ed. The response to constant and harmonic rates of turn is evaluated for both tuned and untuned gyros. Gyro performance is shown to depend upon the relationship between the mistuning of the primary and secondary modes and the secondary mode damping factor.

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“…Displacements in the negative z-axis direction are considered positive. The conversion factors from velocity t o v oltage for each electrode are denoted K S1 and K S2 and are used to de ne the scaling matrix K S as shown in (10). Thus, the gyroscope output equation is…”

Section: Computing Sti Ness Matrix Principal Axes From Input/output Modelsmentioning

confidence: 99%

“…Microgyroscopes will augment other external inertial reference systems such as the Global Positioning System (GPS), sun sensor, or star tracker in future planetary y-by and landing, and interplanetary astrophysics research programs, will use this technology. Tang et al (1996a) gives an overview of the role of micro-inertial systems in spacecraft. The summary by Y azdi et al (1998) describes other e orts to develop a MEMS gyroscope.…”

Section: Introductionmentioning

confidence: 99%

System Identification of a MEMS Gyroscope

M’Closkey

Gibson

Hui

1999

Journal of Dynamic Systems, Measurement, and Control

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This paper reports the experimental system identification of the Jet Propulsion Laboratory MEMS vibratory rate gyroscope. A primary objective is to estimate the orientation of the stiffness matrix principal axes for important sensor dynamic modes with respect to the electrode pick-offs in the sensor. An adaptive lattice filter is initially used to identify a high-order two-input/two-output transfer function describing the input/output dynamics of the sensor. A three-mode model is then developed from the identified input/output model to determine the axes’ orientation. The identified model, which is extracted from only two seconds of input/output data, also yields the frequency split between the sensor’s modes that are exploited in detecting the rotation rate. The principal axes’ orientation and frequency split give direct insight into the source of quadrature measurement error that corrupts detection of the sensor’s angular rate.

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Silicon Bulk Micromachined Vibratory Gyroscope

Cited by 28 publications

References 0 publications

A systematic method for tuning the dynamics of electrostatically actuated vibratory gyros

A systematic method for tuning the dynamics of electrostatically actuated vibratory gyros

The dynamics of a vibrating silicon diaphragm microgyroscope

System Identification of a MEMS Gyroscope

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