A systematic method for tuning the dynamics of electrostatically actuated vibratory gyros

Kim, Dong Joon; M’Closkey, Robert T.

doi:10.1109/tcst.2005.860525

Cited by 40 publications

(9 citation statements)

References 19 publications

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“…The dynamics of the ring gyroscope in the presence of angular rate can be expressed relative to an axis X which Model fitting of frequency response data to estimate dynamics and to calculate tuning voltages 15mHz [19] Dual stages: Feedfoward routine for large imperfections, feedback control for remaining small imperfections.…”

Section: Equations Of Motion In the Absence Of Angular Ratementioning

confidence: 99%

“…These methods have advantages of simpler electronics and operational control, but have limited tuning control and can only be implemented off-line. Alternatively, active mode matching methods such as feedback control [11][12][13][14], electrothermal [15] and electrostatic [16][17][18][19][20] tuning provide greater flexibility and offer real-time implementation. This is summarized in table 1.…”

Section: Introductionmentioning

confidence: 99%

“…Several different approaches to systematic electrostatic tuning are reported in the literature. A disc type vibratory gyroscope was investigated in [19], whereby a fitting routine was used to estimate the dynamic parameters from twoinput/two-output frequency response data sets. Electrostatic tuning voltages are then iteratively calculated from the estimated dynamic parameters.…”

Section: Introductionmentioning

confidence: 99%

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A systematic approach for precision electrostatic mode tuning of a MEMS gyroscope

Zhen¹,

Gallacher²,

Burdess³

et al. 2014

J. Micromech. Microeng.

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In this paper a systematic approach to precision electrostatic frequency tuning of the operational modes of a MEMS ring vibratory gyroscope is presented. In both rate and rate integrating gyroscopes the frequency split between the two modes of vibration which detect the Coriolis acceleration is one of the principal factors in determining the sensitivity and noise floor of the sensor. In high precision applications in the defence/aerospace sector a frequency split of the order of 10 mHz or less is highly desirable. In the ground-breaking Hemispherical Resonator Gyroscope (HRG) electrostatic tuning has been employed as a tuning mechanism. However, a description of the procedure is not available in the literature. The tuning scheme described here involves assessing mode mistuning by the ratio of the in-phase and quadrature components of the response to an external force that has similar properties to the gyroscopic force resulting from Coriolis action, and choosing the tuning voltages so that independent modification of the elements of the system stiffness matrix can be achieved. Experiments on a commercially available gyroscope with a natural frequency of 14 kHz show that the frequency split can be reduced from 1.5 Hz to 6 mHz. This represents a frequency precision of better than 1 part in a million.

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Section: Equations Of Motion In the Absence Of Angular Ratementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

A systematic approach for precision electrostatic mode tuning of a MEMS gyroscope

Zhen¹,

Gallacher²,

Burdess³

et al. 2014

J. Micromech. Microeng.

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show abstract

“…Honeycomb-like disk resonator gyroscopes (HDRGs) [14] and cobweb-like disk resonator gyroscopes (CDRGs) [15] have achieved good results in reducing frequency split. Electrostatic tuning is a widely used method to reduce frequency split in DRGs because of its simple implementation and wide applicability [16][17][18][19]. However, this method requires a high tuning voltage when the frequency split is large, and it is difficult to control the magnitude of large voltages with high precision [20].…”

Section: Introductionmentioning

confidence: 99%

Development of a Novel Gear-like Disk Resonator Applied in Gyroscope

Zhang

Feng

et al. 2022

Applied Sciences

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This paper proposes a novel gear-like disk resonator (GDR). The design, fabrication, and characterization of GDR are presented. In comparison with a ring-like disk resonator (RDR), a GDR replaces the circular rings with meander-shaped rings consisting of linear beams. The finite element method (FEM) is implemented, and the simulation results show that the GDR has a much lower frequency and effective stiffness, higher quality factor (Q), and better immunity to crystal orientation error. Affected by high Q and small frequency splits, the mechanical sensitivity (Smech) is shown to increase greatly. GDR and RDR with the same structure parameters are built side-by-side on the same wafer, and prototypes are fabricated through the SOI fabrication technique. The frequency response test and ring-down test are implemented using a readout circuit under a vacuum condition (5 Pa) at room temperature. The frequency split (9.1 Hz) of the GDR is about 2.8 times smaller than that (25.8 Hz) of the RDR without electrostatic tuning. Compared with the RDR, the Q (19.2 k) and decay time constant (0.59 s) of the GDR are improved by 145% and 236%, respectively. The experimental results show great promise for the GDR being used as a gear-like disk resonator gyroscope (GDRG).

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“…A method commonly used in MEMS to compensate for frequency split of a resonator is by applying electrostatic forces, modifying the effective stiffness associated with the structural mode, [10,11]. The accuracy of the compensation depends on the accuracy of control of the tuning voltages.…”

Section: Introductionmentioning

confidence: 99%

Compensation of frequency split by directional lapping in fused quartz micro wineglass resonators

Wang

Asadian

Shkel

2018

J. Micromech. Microeng.

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We present, for the first time, a permanent structural asymmetry compensation method for fused quartz micro wineglass resonators. Using the technique, we demonstrated a near six times reduction of structural asymmetry (n = 2 wineglass mode), culminating in reduction of the frequency split from 41 to 7 Hz. This is an iterative process. In each iteration, the structural asymmetry was first identified by measuring the mode shape of the resonators. Then, directional lapping was performed with specially designed lapping fixtures to accurately control the lapping angle down to 1°. Analytical predictions and numerical simulations were conducted to study the structural asymmetry phenomenon and the effects of compensation on the quality factor of the structure, showing the ability of this process to reduce the structural asymmetry, while not affecting the overall quality factor of the resonators.

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A systematic method for tuning the dynamics of electrostatically actuated vibratory gyros

Cited by 40 publications

References 19 publications

A systematic approach for precision electrostatic mode tuning of a MEMS gyroscope

A systematic approach for precision electrostatic mode tuning of a MEMS gyroscope

Development of a Novel Gear-like Disk Resonator Applied in Gyroscope

Compensation of frequency split by directional lapping in fused quartz micro wineglass resonators

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