Abstract:This paper presents an extremely power-insensitive microelectromechanical systems (MEMS) tunable capacitor equipped with immobilization capability in the moving plates when an radio frequency signal is flowing. The proposed tunable capacitor is similar to the conventional metal-insulator-metal capacitor, but the top metal plate is capable of moving laterally as well as vertically; it moves to the left and right to set the capacitance value by modulating the overlap area between the top and bottom plates (analo… Show more
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