1995
DOI: 10.1007/bf00125886
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SiGe band engineering for MOS, CMOS and quantum effect devices

Abstract: In this paper, we review recent progress in SiGe MOS technology. Progress in high mobility p-channel and n-channel devices will be presented as well as some of the materials and processing issues related to the fabrication of these heterostructures. In addition, we will present an outlook on the integration of these devices to complimentary MOS (CMOS) based on Si on Insulator technology (SOl). New directions of novel devices utilizing selective epitaxial growth and the integration of Si/Ge superlattices for en… Show more

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Cited by 42 publications
(22 citation statements)
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References 74 publications
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“…12 The mismatch is completely accommodated by uniform lattice strain and the interatomic distances parallel to the interfacial plane, i.e. the "effective" lattice constants in the plane, remain equal to the equilibrium value of the substrate material.…”
Section: Theoretical Approach a Strain In Si Layersmentioning
confidence: 99%
“…12 The mismatch is completely accommodated by uniform lattice strain and the interatomic distances parallel to the interfacial plane, i.e. the "effective" lattice constants in the plane, remain equal to the equilibrium value of the substrate material.…”
Section: Theoretical Approach a Strain In Si Layersmentioning
confidence: 99%
“…The resultant two dimensional carrier gas may enhance their motilities and therefore device performance. 1 For this reason, Ge-based ͑such as GeMn͒ diluted magnetic semiconductors ͑DMSs͒, compatible with the current Si technology, have been studied extensively. [2][3][4][5][6][7][8][9][10][11][12][13] It is well understood that the low solubility of Mn in Ge has been a main barrier to achieve a high T c DMS GeMn film with high Mn concentration and uniformly distributed Mn in Ge.…”
mentioning
confidence: 99%
“…Among them, (Ga,Mn)As became the first and the mostly studied DMSs since 1996 (Lu and Lieber, 2006); but to our knowledge, some studies lacked the threshold doping profile to push its curie temperature to room temperature and above (currently around 190 K (Lyu and Moon, 2003, van der Meulen et al, 2008, Maekawa, 2006, Wang et al, 1995). Since then, substantial research has been carried out in III-V and II-VI semiconductors to improve the T c by increasing the solubility limit and meanwhile minimizing self-compensation effect of magnetic structures, using radical techniques such as delta doping of modulation doped quantum structures (Bhatt et al, 2002, Cho et al, 2008, Berciu and Bhatt, 2001, Lauhon et al, 2002.…”
Section: Introductionmentioning
confidence: 99%