SiC synthesis by a plasma deposition process

Properties of amorphous SiC coatings deposited on WC-Co substrates

“…Their applications may range from protective coatings against corrosion of steel 5,6 to microelectronic devices 7 and from X ray mask materials 8 to protection of thermonuclear reactor walls 9 , among others. These films can be deposited by a variety of techniques such as laser assisted deposition 10 , dynamic ion mixing 11 , plasma enhanced chemical vapor deposition 12 , magnetron sputtering 2 and many others. From the various possible choices, magnetron sputtering appears to be a very attractive one due to its relative simplicity, high attainable deposition rates and wide acceptance by industry.…”

Oxidation study of plasma-enhanced chemical vapor deposited and rf sputtered hydrogenated amorphous silicon carbide films

“…Figure 2 plots the integrated intensities of these bonds as a function of x for the asprepared and oxidized samples. For the as-prepared films, the intensities of Si-C and Si-H bonds reduce, and Si-CH 3 increases as x increases from 0.3 to 0.8. Weider et al 18 have also reported an increase in the Si-CH 3 and a decrease in Si-C absorption intensities from their a-Si 1Ϫx C x :H films as x increases from ϳ0.3 to 0.8.…”

“…Most of the research on a-Si 1Ϫx C x :H films is on the optical and structural properties of this material. 1,2 On the other hand, there are other applications of a-Si 1Ϫx C x :H films, such as passivation of electrical devices, 3,4 coating material for glass and metal for ultraviolet optics, 5 and as a masking material for micromechanical devices. 6 Most of these applications required the films to possibly go through a high temperature process in an inert or oxidizing ambient.…”

Fabrication of hydrogenated amorphous silicon carbide films by decomposition of hexamethyldisilane with microwave discharge flow of Ar

“…As potential candidates for the mechanical, electronic, and biomedical applications, thin films of amorphous carbon and related materials have attracted much attention. 1,2) Among them, amorphous silicon carbides (a-SiC x ) and hydrogenated a-SiC x (a-SiC x :H) have been expected for the applications of protective coatings, [3][4][5][6][7] solar cells, 8,9) low frictions, 4,10,11) and biocompatibilities. 12) Recently, the standardizations of amorphous carbon and related materials including a-SiC x (:H) have been promoted in Japan for the industrial applications of these materials.…”