SiC nanowire-based SU-8 with enhanced mechanical properties for MEMS structural layer design

Yu, Yan; Lai, Liyan; Ding, Guifu; Chen, Ting

doi:10.1016/j.npe.2019.11.002

Cited by 9 publications

(6 citation statements)

References 23 publications

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“…Therefore, it is believed that the ML-GF/SU-8 composites with excellent mechanical and thermal performance could satisfy higher requirements of MEMS devices, and realize its practical applications in functional microstructures. [20] A little larger -10wt% Graphite / SU-8 composites [33] 148 -PFPE + graphite/ SU-8 composites [22] 32 -SiC Nanowire/ SU-8 composites [34] 40 -7wt% Clay/SU-8 composites [35] About 20% -Single layer of glass fabric/SU-8 composites [29] 35% -2.5 wt% silica nanoparticles/SU-8 composites [23] − 22% 107%…”

Section: Resultsmentioning

confidence: 99%

Enhancement of Mechanical and Thermal Properties of SU-8 Photoresist with Multilayer Woven Glass Fabric Based on Micromachining Technology

Zhou

Sun

et al. 2020

Electron. Mater. Lett.

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SU-8 photoresist has been more and more widely used as a structural material in micro electromechanical system (MEMS) because of its low cost and excellent biocompatibility. However, the inferior mechanical and thermal performances immensely impinge the reliability of the MEMS device based SU-8 and accordingly restrict its application. Here we report the mechanical and thermal performance of SU-8 reinforced by the multilayer glass fabric with the MEMS technology. The finite element simulation and specific experiment are conducted, which confirm that the reinforced SU-8 composites have a 281% increase in Young's modulus and a 64% decrease in coefficient of thermal expansion (CTE) compared with pure SU-8. Additionally, the improved mechanism has also been analyzed, including the excellent interface bonding between the SU-8 and glass fabric, and the high-bond energy of Si-O-Si chain structures in glass fabric. Furthermore, the glass fabric reinforced SU-8 could still possess a high light transmittance to maintain the ability of lithography patterning. Therefore, it is believed that the strategy proposed here may satisfy higher requirements of MEMS devices, which guarantees its practical applications in the functional microstructures.

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Section: Resultsmentioning

confidence: 99%

Enhancement of Mechanical and Thermal Properties of SU-8 Photoresist with Multilayer Woven Glass Fabric Based on Micromachining Technology

Zhou

Sun

et al. 2020

Electron. Mater. Lett.

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“…Silicon carbide (SiC) is the most widely used non-oxide ceramic, which has applications in many industrial fields, due to its special semiconducting and spin-related properties, high mechanical strength and hardness, high thermal conductivity, resistance to corrosion and thermal shock, etc. [1][2][3][4][5][6][7][8][9][10][11][12]. In modern literature, various SiC-based nanomaterials are also actively discussed in terms of their usage in manufacturing implantable microelectrodes, highly porous membranes [8], biosensors [8][9][10][11][12], micro-(MEMS) and nanoelectromechanical systems (NEMS) [5], and heat-resistant coatings [11].…”

Section: Introductionmentioning

confidence: 99%

“…[1][2][3][4][5][6][7][8][9][10][11][12]. In modern literature, various SiC-based nanomaterials are also actively discussed in terms of their usage in manufacturing implantable microelectrodes, highly porous membranes [8], biosensors [8][9][10][11][12], micro-(MEMS) and nanoelectromechanical systems (NEMS) [5], and heat-resistant coatings [11]. A number of methods to synthesize nano-and micropowders have already been developed, including growth from hydrogen silicone oil [6], mechanical grinding [11,12], fast carbothermal synthesis [13][14][15], combustion synthesis [16], microwave synthesis [17], pyrolysis of polymers [18], sol-gel processes [19], CVD [20], and laser synthesis [21].…”

Section: Introductionmentioning

confidence: 99%

Structural and Optical Properties of Silicon Carbide Powders Synthesized from Organosilane Using High-Temperature High-Pressure Method

et al. 2021

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The development of new strategies for the mass synthesis of SiC nanocrystals with high structure perfection and narrow particle size distribution remains in demand for high-tech applications. In this work, the size-controllable synthesis of the SiC 3C polytype, free of sp2 carbon, with high structure quality nanocrystals, was realized for the first time by the pyrolysis of organosilane C12H36Si6 at 8 GPa and temperatures up to 2000 °C. It is shown that the average particle size can be monotonically changed from ~2 nm to ~500 nm by increasing the synthesis temperature from 800 °C to 1400 °C. At higher temperatures, further enlargement of the crystals is impeded, which is consistent with the recrystallization mechanism driven by a decrease in the surface energy of the particles. The optical properties investigated by IR transmission spectroscopy, Raman scattering, and low-temperature photoluminescence provided information about the concentration and distribution of carriers in nanoparticles, as well as the dominant type of internal point defects. It is shown that changing the growth modes in combination with heat treatment enables control over not only the average crystal size, but also the LO phonon—plasmon coupled modes in the crystals, which is of interest for applications related to IR photonics.

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“…For some special application fields, such as marine cargo ships, warships, marine engineering, etc., the protective coatings require not only the corrosion resistance of the coating but also extremely high wear resistance and antifouling performance. It is well known that the SiC nanoparticle has excellent wear resistance, corrosion resistance, and excellent heat resistance [20][21][22], which can meet the requirements of super wear-resistant coatings [23]. In addition, the surface of SiC is rich in hydroxyl groups, and surface treatment can be an effective method to make it a hydrophobic material [24].…”

Section: Introductionmentioning

confidence: 99%

Reinforced Superhydrophobic Anti-Corrosion Epoxy Resin Coating by Fluorine–Silicon–Carbide Composites

Zhang

Nie

et al. 2020

Coatings

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SiC was modified by fluorine-containing organic substance 1H,1H,2H,2H-trifluoro-noctyltriethoxysilane (FAS) to change its hydrophilicity from hydrophilic to superhydrophobic nanoparticles, and the optimum conditions for hydrophobicity were effectively explored. Then, different content of fluorine-modified SiC (F–SiC) nanoparticles were added to the epoxy resin (EP) matrix to prepare composite coating samples. The results showed that the surface of SiC was modified by FAS to show superhydrophobicity, and the dispersion in EP was significantly improved. After adding F–SiC, the hydrophobicity, wear resistance and corrosion resistance of the coating were significantly improved. In addition, the corrosion resistance of the composite coating containing different contents of F–SiC was analyzed through electrochemical and salt spray tests. The results showed that the corrosion resistance of the coating was the best when the addition amount was 3 wt %. In general, the composite coating with 3 wt % F–SiC had the best overall performance. Compared with the EP coating, the water contact angle of 3 wt % F–SiC/EP composite coating was increased by 62.9%, the friction coefficient was reduced by 73.5%, and the corrosion current was reduced by three orders of magnitude. This study provides a new idea for the development of ultra-wear-resistant and anti-fouling heavy-duty coatings.

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SiC nanowire-based SU-8 with enhanced mechanical properties for MEMS structural layer design

Cited by 9 publications

References 23 publications

Enhancement of Mechanical and Thermal Properties of SU-8 Photoresist with Multilayer Woven Glass Fabric Based on Micromachining Technology

Enhancement of Mechanical and Thermal Properties of SU-8 Photoresist with Multilayer Woven Glass Fabric Based on Micromachining Technology

Structural and Optical Properties of Silicon Carbide Powders Synthesized from Organosilane Using High-Temperature High-Pressure Method

Reinforced Superhydrophobic Anti-Corrosion Epoxy Resin Coating by Fluorine–Silicon–Carbide Composites

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