SiCN nanometric powder produced in square-wave modulated RF glow discharges

Viera, G.; Andújar, J.L.; Sharma, S.N.; Bertrán, E.

doi:10.1016/s0925-9635(97)00229-x

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Cited by 13 publications

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“…Quantitative composition analyses of the ®lms were performed by RBS. High energy 4 He ion beams of 3.5 MeV with a ®xed scattering angle of 165³ were employed to increase the sensitivity of N and C elements. 15,16 The non-RBS cross sections of 4 He ion from C and N 15,16 were linked to the RUMP2 program (ver.…”

Section: Methodsmentioning

confidence: 99%

“…1,2 Amorphous SiCN nano-powders produced by laser and RF discharges have also been reported. 3,4 Riedel et al 5 adopted polyorganosilylcarbodiimides as precursor materials and have successfully synthesized nanocrystalline Si 2 CN 4 . We have demonstrated that large (#mm) silicon carbon nitride crystals with a wide range of composition are deposited by microwave CVD.…”

Section: Introductionmentioning

confidence: 99%

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