Ship-in-a-Bottle Biomicrochips Fabricated by Hybrid Femtosecond Laser Processing

Abstract

Abstract:We demonstrate fabrication of highly functional biomicrochips by hybrid femtosecond laser processing. In this process, 3D microfluidic structures are first formed inside photosensitive glass by femtosecond laser direct writing followed by thermal treatment and successive chemical wet etching. Then, functional microcomponents are integrated inside the fabricated microfluidic structures by two-photon photopolyerization. We term the fabricated microchips ship-in-a-bottle biomicrochips,

Femtosecond Laser-Induced Surface Modification and its Application

“…Using high-energy laser pulses, micrometer-size-rugged surfaces are formed inside the channel structures ablated by femtosecond laser pulses [39][40][41]. It is also important to understand the formation mechanism of micrometer-scale surfaces for femtosecond laser direct writing technologies in which relatively higher laser energies are used to fabricate a 3D structure such as fluidic channels [3,42,43], sampling cells [19,21,22], and interferometers [44][45][46]. Different generating processes will induce different mechanical responses, which will be detailed in the following.…”