Shape measurement of workpiece surface with zone-plate interferometer during machine running

Nomura, Takashi; Miyashiro, Hiroshi; Kamiya, Kazuhide; Yoshikawa, Kunihiko; Tashiro, Hatsuzo; Suzuki, Masane; Usuki, Masao; Kobayashi, Fumio

doi:10.1016/0141-6359(93)90342-8

Cited by 10 publications

(2 citation statements)

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“…In a common-path interferometer, the reference beam and the measurement beam travel along the same path. In an on-machine zone-plate interferometer, a zone-plate [180], which is a CGH with circular diffraction structures, serves as a beam splitter to divide the illumination beam into the zeroth and the first order beams, working as the reference beam and the measurement beam, respectively. Since the reference and measurement paths are common, the generated interferograms are only minimally influenced by machine vibration and air disturbances.…”

Section: Reference Mirrormentioning

confidence: 99%

“…Since the reference and measurement paths are common, the generated interferograms are only minimally influenced by machine vibration and air disturbances. It has been demonstrated that stable interferograms were obtained when a spherical workpiece was being rotated by the spindle at a rotational speed of 900 rpm, which was the same as the speed for cutting the workpiece [180]. Since an asymmetric wavefront can Fig.…”

Section: Reference Mirrormentioning

confidence: 99%

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On-machine and in-process surface metrology for precision manufacturing

et al. 2019

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On-machine and in-process surface metrology are important for quality control in manufacturing of precision surfaces. The classifications, requirements and tasks of on-machine and in-process surface metrology are addressed. The state-of-the-art on-machine and in-process measurement systems and sensor technologies are presented. Error separation algorithms for removing machine tool errors, which is specially required in on-machine and in-process surface metrology, are overviewed, followed by a discussion on calibration and traceability. Advanced techniques on sampling strategies, measurement systems-machine tools interface, data flow and analysis as well as feedbacks for compensation manufacturing are then demonstrated. Future challenges and developing trends are also discussed.

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Section: Reference Mirrormentioning

confidence: 99%

Section: Reference Mirrormentioning

confidence: 99%

On-machine and in-process surface metrology for precision manufacturing

et al. 2019

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Zone-Plate Interferometer for Measuring the Shape Error of Mirrors with Large Numerical Aperture and Steep Asphericity

Nomura

Kamiya

Miyashiro

et al. 1996

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A compact zone-plate interferometer is developed to measure the shape error of concave mirrors. A diffracted light of (O, O) and that of (-1, -1) or (+1, +1) are used in the interferometer. The interferometer enables us to measure the shape error of mirrors with a large numerical aperture and a steep asphericity. The shape errors of a spherical mirror and a parabolic mirror are measured by the interferometer, and that of the former agrees well with that measured by Fizeau interferometer. Methods for adjustments of zone plates and the mirrors being tested are proposed to perform precise measurements of the mirror shapes.

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