Abstract:A compact zone-plate interferometer is developed to measure the shape error of concave mirrors. A diffracted light of (O, O) and that of (-1, -1) or (+1, +1) are used in the interferometer. The interferometer enables us to measure the shape error of mirrors with a large numerical aperture and a steep asphericity. The shape errors of a spherical mirror and a parabolic mirror are measured by the interferometer, and that of the former agrees well with that measured by Fizeau interferometer. Methods for adjustment… Show more
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