Sequential analysis of diamond nucleation on silicon (001) with bias enhanced nucleation using X‐ray photoelectron spectroscopy and reflection high energy electron diffraction investigations
Abstract:Phone: +33 (0) 3 83 58 40 94, Fax: +33 (0) 3 83 53 47 64Diamond synthesis by microwave plasma assisted chemical vapour deposition (MPCVD) with a bias enhanced nucleation (BEN) step constitutes the most efficient method to obtain heteroepitaxy and is also useful to reach high nucleation densities. In this study, sequential reflection highenergy electron diffraction (RHEED) and X-ray photoelectron spectroscopy (XPS) investigations enabled us to highlight the formation of amorphous carbon and crystalline silicon … Show more
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