“…Under such conditions, deformation was confined to the plastic zone, and material removal occurred in the ''ductile regime'', which prevented crack formation and surface damage [6][7][8][12][13][14][15]. With this understanding, ultra-precision grinding was successfully used to produce smooth surfaces of surface roughness in nanometer scale in materials such as glass, silicon, germanium, cemented carbides and other ceramics [11,[16][17][18][19][20]. However, little has been reported about its application in nanostructured multi-layer materials.…”