Self-repairing characteristics in the solid-state Al2O3 film capacitors

J Mater Sci: Mater Electron

et al. 2016

Self Cite

Dielectric breakdown behavior of sol-gel derived SrTiO 3 films has been studied systematically. The dielectric strength and leakage characteristics of SrTiO 3 films were observed to have a strong dependence on the top electrode materials. Compared with films with Ti or Al electrode, SrTiO 3 films with Au electrode exhibited relatively low dielectric breakdown strength. Simultaneously, a broad area of damage occurred in the Au electrode after breakdown, which is closely related to the self-healing breakdown mechanism. The corresponding leakage current kept the same order of magnitude when the electric field was higher than 100 MV/m. The higher dielectric strength of the films with Ti or Al electrode is attributed to anodic oxidation of metal electrode.

Section: Resultssupporting

confidence: 89%

Dielectric breakdown characteristics of sol–gel derived SrTiO3 films

Peng

J Mater Sci: Mater Electron

et al. 2016

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“…Therefore, high breakdown strength makes a more pronounced contribution to the energy storage density. Moreover, the breakdown strength and leakage current had been observed to have a strong dependence on the electrode materials [8,9]. Anodic oxidation reaction was found in the sol-gel thin films with valve metal electrodes, especially the anodization of Al electrodes [10,11].…”

Section: Introductionmentioning

confidence: 99%

Enhancement of breakdown strength of SrTiO3/nano-SiO2 composite film prepared by sol-gel technology

et al. 2017

Ceramics International

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Dielectric (1-x)SrTiO 3 /xSiO 2 (x=0, 0.01, 0.05 and 0.1) composite thin films were deposited onto Pt (100)/Ti/SiO 2 /Si substrates via sol-gel and spin coating technology and their surface morphology was examined by field emission scanning electron microscopy, indicating that surface morphology was apparently influenced by the nano-SiO 2 addition. A broad adsorption band at 3200-3500 cm-1 attributed to stretching vibrations of O-H bonds in the absorbed water was observed in fourier transform infrared spectroscopy (FTIR). The X-ray photoelectron spectroscopy (XPS) results show that nano-SiO 2 particles facilitate water absorption of STO thin films. The breakdown strength of SrTiO 3 /nano-SiO 2 composite films is increased to about 332 MV/m. At the same time, the leakage current of 0.9SrTiO 3 /0.1SiO 2 composite thin films decreases by two orders of magnitude under high electric field. Above results show that nano-SiO 2 particles facilitate water absorption of the thin films, making SrTiO 3 act as an effective solid state electrolyte for the anodic oxidation to achieve higher breakdown strength.

“…In our previous work [12,13], we found that the sol-gel-derived amorphous aluminum oxide (AmAO) film as an excellent dielectric medium with very high breakdown strength [14][15][16][17] can also behave as an effective solid-state electrolyte satisfied the requirement of the self-healing reaction (anodic oxidation) under high electric field at the mean time. The structures of the AmAO film and the Al film are propitious to the transport of both cations and anions involved in the anodic oxidation.…”

Section: Introductionmentioning

confidence: 99%

Ionic transport and barrier effect of anodic oxide layer in a solid-state Al2O3 capacitor under high electric field

Chen

et al. 2017

Electrochimica Acta

Self Cite

Dry anodic oxidation as an effective electrical self-healing method in a solid-state Al 2 O 3 capacitor was investigated in terms of ionic transport study. Sol-gel-derived amorphous aluminum oxide (AmAO) film as dielectric and aluminum (Al) film as top electrode of the capacitor were prepared on platinized silicon substrates. When a negative voltage was applied to the Al electrode pad, the ionic transport would induce the failure of the Al electrode. Nevertheless, such failure could be inhibited by the barrier effect of an anodic aluminum oxide (AAO) layer formed at the Al/AmAO interface when positive voltage was applied to the Al electrode pad previously. The barrier effect of the AAO layer was controlled by the maximum applied positive voltage. An ionic transport model was proposed to explore the dry anodic oxidation in the solid-state Al 2 O 3 capacitor.