Ionic transport and barrier effect of anodic oxide layer in a solid-state Al2O3 capacitor under high electric field

Abstract

Dry anodic oxidation as an effective electrical self-healing method in a solid-state Al 2 O 3 capacitor was investigated in terms of ionic transport study. Sol-gel-derived amorphous aluminum oxide (AmAO) film as dielectric and aluminum (Al) film as top electrode of the capacitor were prepared on platinized silicon substrates. When a negative voltage was applied to the Al electrode pad, the ionic transport would induce the failure of the Al electrode. Nevertheless, such failure could be inhibited by the barrier effect of an anodic aluminum oxide (AAO) layer formed at the Al/AmAO interface when positive voltage was applied to the Al electrode pad previously. The barrier effect of the AAO layer was controlled by the maximum applied positive voltage. An ionic transport model was proposed to explore the dry anodic oxidation in the solid-state Al 2 O 3 capacitor.

Interfacial Oxidized Gate Insulators for Low-Power Oxide Thin-Film Transistors

“…Further oxidation of the metal needs the oxygen atoms to diffuse across the metal oxide from the oxygen source. Many oxides with ionic bonding characters are known to show ionic conduction and the oxygen diffusion is enhanced by the electric field. − …”

Overview of Engineering Carbon Nanomaterials Such As Carbon Nanotubes (CNTs), Carbon Nanofibers (CNFs), Graphene and Nanodiamonds and Other Carbon Allotropes inside Porous Anodic Alumina (PAA) Templates

“…In this case, the native barrier layer is growing until it reaches a critical thickness from which the process cannot evolve anymore because the strength of the electric field is not strong enough to transport the ions through this insulating layer. Nowadays, thin anodic oxide films in the nanometer scale are important for the insulation and encapsulation of components in advanced micro/nanoelectronic devices [ 57 , 58 ]. The present review mentions the barrier-type anodic alumina for sake of completeness because the main objective is to explore the porous nature of the anodic alumina oxide as shown in Figure 3 b.…”