Self-formation of dual glassy-crystalline structure in magnetron sputtered W–Zr films

Zeman, Petr; Haviar, Stanislav; Červená, Michaela

doi:10.1016/j.vacuum.2021.110099

Cited by 9 publications

(1 citation statement)

References 26 publications

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“…Although these studies primarily focused on the binary Zr-Mo and Zr-W systems, similar microstructures have been observed in Ti-Al 30 , Ti-O 31 and Al-N 32 films, suggesting the possibility to generalize the concept. Other authors have recently reported the phenomenon in the Zr-W system using different deposition conditions 33 . Moreover, we have also shown that it occurs under a wide range of deposition conditions.…”

Section: Introductionmentioning

confidence: 99%

Growth kinetics and origin of residual stress of two-phase crystalline–amorphous nanostructured films

Borroto

Bruyère

Migot

et al. 2021

Journal of Applied Physics

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Composition-driven amorphous-to-crystalline transition is widely observed in sputter-deposited thin films. We have recently shown that peculiar two-phase crystalline-amorphous nanostructures can be obtained for compositions in the transition zone between single-phased amorphous and crystalline films, offering a new possibility to control surface topography and related functional properties. Here, the growth kinetics of the two-phase nanostructures formed in the transition zone is explored and related to residual stress measurements. From the analysis of top-view scanning electron microscopy images, the evolution with the film thickness of relevant parameters describing the growth process was extracted, i.e., surface coverage, volume fraction and perimeter per unit area of the crystalline regions growing in competition with the amorphous ones. We demonstrate, supported in the aforementioned parameters, that residual stress evolution in the transition zone is governed by the nucleation, growth and interaction of the crystalline regions during the competitive growth process. Our results shed new light on the kinetics of the crystalline-amorphous competitive growth phenomenon and demonstrate the relevance of residuals stress measurements for exploring the growth mechanisms of complex film microstructures.

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Section: Introductionmentioning

confidence: 99%