Selective local synthesis of nanowires on a microreactor chip

IEEE Trans. Nanotechnology

Shih

Wu³

et al. 2013

Self Cite

A catalyst-free synthesis of ZnO nanostructures using platinum microheaters under ambient environmental conditions has been developed. Different types of ZnO nanostructures are synthesized from the oxidization of Zn thin film by local heating. The characterization of two shapes of Pt microheaters is investigated and the relationship between the applied power for heat generation and ZnO nanostructure synthesis is investigated by local heating experiments under ambient conditions. Based on the developed heating approach, synthesis area, location, and morphologies of ZnO nanostructures can be controlled through the deposited thickness of Zn layer and applied heating voltages. Furthermore, a connected multiple-structure (Zn-ZnO-Zn) layer is synthesized using combinative multimicroheaters.Index Terms-Local nanostructure synthesis, microheaters, post-CMOS nanostructure integration, zinc oxide nanostructures.

Section: Introductionmentioning

confidence: 99%

Synthesis of Zinc Oxide Nanostructures by Microheaters in the Ambient Environment

IEEE Trans. Nanotechnology

Shih

Wu³

et al. 2013

Self Cite

“…The fabrication of microheater devices is seen to be compatible with conventional semiconductor processing and it is possible to use such devices to locally synthesize nanostructures directly onto specified device locations. For instance, planar microheaters have been previously employed to synthesise carbon nanotubes on semiconductor substrates [3].…”

Section: Introductionmentioning

confidence: 99%

Characterization and fabrication of zinc oxide nanowire devices

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)

Shih

et al. 2013

In this paper, we demonstrate an approach for the local synthesis of ZnO nanowires (ZnO NWs) and the potential for such structures to be incorporated into device applications. Three network ZnO NW devices are fabricated on a chip by using a bottom-up synthesis approach.Microheaters (defined by standard semiconductor processing) are used to synthesize the ZnO NWs under a zinc nitrate (Zn(NO 3 ) 2 ·6H 2 O) and hexamethylenetetramine (HMTA, (CH 2 ) 6 ·N 4 ) solution. By controlling synthesis parameters, varying densities of networked ZnO NWs are locally synthesized on the chip. The fabricated networked ZnO NW devices are then characterized using UV excitation and cyclic voltammetry (CV) experiments to measure their photoresponse and electrochemical properties. The experimental results show that the techniques and material systems presented here have the potential to address interesting device applications using fabrication methods that are fully compatible with standard semiconductor processing.

“…Several kinds of microfabricated heaters, such as micro-bridges, cantilevers or planar heaters [6], have been implemented for nanostructure synthesis including the synthesis of carbon nanotubes (CNTs) and silicon nanowires. This processing approach provides the possibility for compatibility with post-CMOS foundry integration and may act as an important technology enabler for applications in sensing.…”

Section: Introductionmentioning

confidence: 99%

Catalyst-free synthesis of zinc oxide nanostructures by microheaters in the ambient environment

2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Seshia

Wu³

et al. 2011

This paper demonstrates a catalyst-free synthesis of ZnO nanostructures using platinum microheaters under ambient environmental conditions. Different morphologies of ZnO nanostructures are synthesized from the oxidization of Zn thin film by local heating. The synthesized ZnO structures are characterized by the SEM, EDX and Raman spectra. The characterization of two shapes of Pt microheaters is investigated and the relationship between the applied heating power and ZnO nanostructures synthesis is investigated under ambient conditions. We observe that the density and morphology of ZnO nanostructures can be controlled through applied heating voltages. Furthermore, a connected composite structural (Zn-ZnO-Zn) layer is synthesized using combinative microheaters.