Seedless Cu Electroplating on Ru-W Thin Films for Metallisation of Advanced Interconnects

Abstract

For decades, Ta/TaN has been the industry standard for a diffusion barrier against Cu in interconnect metallisation. The continuous miniaturisation of transistors and interconnects into the nanoscale are pushing conventional materials to their physical limits and creating the need to replace them. Binary metallic systems, such as Ru-W, have attracted considerable attention as possible replacements due to a combination of electrical and diffusion barrier properties and the capability of direct Cu electroplating. The process of Cu electrodeposition on Ru-W is of fundamental importance in order to create thin, continuous, and adherent films for advanced interconnect metallisation. This work investigates the effects of the current density and application method on the electro-crystallisation behaviour of Cu. The film structure, morphology, and chemical composition were assessed by digital microscopy, atomic force microscopy, scanning and transmission electron microscopies, energy-dispersive X-ray spectroscopy, and X-ray diffraction. The results show that it was possible to form a thin Cu film on Ru-W with interfacial continuity for current densities higher than 5 mA·cm−2; however, the substrate regions around large Cu particles remained uncovered. Pulse-reverse current application appears to be more beneficial than direct current as it decreased the average Cu particle size.

Electrodeposition of Ru on Nanoscale Trench Patterns

“…Advanced semiconductor technology relies heavily on interconnect technology, as scaled interconnections allow for the production of smaller transistors with superior performance. 1,2 Copper has emerged as a popular metal for interconnections due to its low electrical resistivity, which enhances reliability by minimizing electromigration. 3 Despite its advantages, the resistivity of copper interconnects increases as interconnect dimension shrink during back-end-of-line (BEOL) scaling, leading to significant RC delay and power consumption issues.…”