International Electron Devices Meeting. IEDM Technical Digest
DOI: 10.1109/iedm.1997.650381
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Secondary Electron flash-a high performance, low power flash technology for 0.35 μm and below

Abstract: This work presents recent results on Secondary Electron flash memory, and contrasts this approach to standard techniques for scaled, low power mass storage applications.

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Cited by 57 publications
(16 citation statements)
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“…2 shows T P as a function of V D for different V B at a constant V CG . However, it should also be noted that programming using the secondary electrons is a self-limiting process, where the maximum V TH attainable is limited by V CG [6]. Fig.…”
Section: A Effect Of Substrate Bias On Program and Drain Disturbmentioning
confidence: 99%
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“…2 shows T P as a function of V D for different V B at a constant V CG . However, it should also be noted that programming using the secondary electrons is a self-limiting process, where the maximum V TH attainable is limited by V CG [6]. Fig.…”
Section: A Effect Of Substrate Bias On Program and Drain Disturbmentioning
confidence: 99%
“…Compared with CHE, CHISEL offers faster program speed under equivalent power, lower power consumption under similar speed, better cycling endurance of V TH window, and lower degradation of program time T P [6], [9], [10], [16], [17]. CHISEL also leads to a selfconvergent programming, giving a better control over program V TH [4], [6], [11].…”
mentioning
confidence: 99%
“…In CHISEL programming, holes generated out of impact ionization (II) by channel electrons get accelerated by large vertical field of drain-substrate junction (DSJ) (due to V B ) and cause further II. The generated secondary electrons gain energy in DSJ vertical field and get injected into FG, thereby enhancing programming efficiency [2][3][4][5]. From a programming perspective SSEP operates midway between CHE and CHISEL, and utilizes an optimum V B determined by drain disturb minimization (as explained later) rather than programming efficiency maximization (as historically is the case for CHISEL).…”
Section: Introductionmentioning
confidence: 99%
“…Compared to CHE, CHISEL offers faster program speed, lower power consumption, and much better cycling endurance [2][3][4][5], but results in a higher program drain disturb [6]. CHE drain disturb originates from sub-threshold channel leakage and worsens when L FG is scaled, and CHISEL drain disturb originates from band-to-band-tunneling (BTBT) at drain junction and worsens when S/D junction depth (X J ) is scaled [6].…”
Section: Introductionmentioning
confidence: 99%
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