We
demonstrate a straightforward construction of MoTe2 PN
homojunction on a silicon photonic crystal cavity, which promises
the realizations of cavity-enhanced optoelectronic devices integrated
on silicon photonic chips. The employed silicon photonic crystal cavity
has an air-slot in the middle to split it into two parts, which directly
function as two individual back-gate electrodes of the top-coated
few-layer MoTe2. Beneficial from MoTe2’s
ambipolar property, reconfigured (PN, NN, PP, NP) homojunctions are
realized by controlling the gate voltages of the two separated silicon
electrodes. For instance, on/off ratios exceeding 104 are
obtained from the PN or NP homojunctions, and the ideality factors
could approach 1.00. On the other hand, the silicon photonic crystal
cavity could enhance light absorption in the coated MoTe2, promising high-performance photodetection. By coupling the resonant
mode with the MoTe2 PN junction, a high photoresponsivity
of 156 mA/W is obtained at the wavelength of 1353.7 nm, though it
is the limit of MoTe2’s absorption bandedge. As
attributes of the PN junction, the photodetector has a dark current
as low as 0.14 nA and a response bandwidth exceeding 1.1 GHz. The
proposed device geometry has advantages of employing silicon photonic
crystal cavity as the back gates of MoTe2 PN junction directly
and simultaneously to enhance light–MoTe2 interactions,
which might open a new avenue to construct MoTe2-based
laser diodes and electro-optic modulators on silicon photonic chips.