Scanning moiré at high magnification using optical methods

Read, David T.; Dally, J. W.; Szanto, M.

doi:10.1007/bf02322486

Cited by 40 publications

(24 citation statements)

References 4 publications

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“…Different techniques exist for creating the grids, using the scanning of a beam to "draw" lines with a periodic pitch p (from a few tens of nanometres) [17]. Another technique, using a photoresist deposited on the sample, consists in obtaining the grating by photolithography [18,19]. The normal pitch varies from 1 μm to a few tens of micrometres.…”

Section: Optical Grid Methodsmentioning

confidence: 99%

In Plane Displacement Formulation for Finite Cracked Plates Under Mode I Using Grid Method and Finite Element Analysis

2009

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A grid method is used to experimentally determine the in-plane displacement fields around a crack tip in a Single-Edge-Notch (SEN) tensile polyurethane specimen. Horizontal displacement u x-exp and vertical displacement u y-exp are expressed as functions of circular coordinates centred on the crack tip. These are compared with the approximate solutions of linear elastic fracture mechanics with a view to studying the applicability to polymers. The results show that this solution is not in agreement with the experiments at the focused on the vicinity of a crack tip. Taking this into account, an FEA program is developed with CAST3M for the purpose of comparing the experimental displacements and the numerical data. New formulations of displacements u x and u y are then developed. These formulations are derived from the principle of superposition and based on Arakawa's formulation. With the displacement gradients obtained from the FEA and the new formulations, the determination of J-integrals is found to be in very good agreement with those derived from numerical calculation. Consequently, the proposed formulations can give displacement fields compatible with the Jintegral calculation for the region near the crack tip. An application based on an experimental test is proposed to evaluate the performances of the proposed formulations.

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Section: Optical Grid Methodsmentioning

confidence: 99%

In Plane Displacement Formulation for Finite Cracked Plates Under Mode I Using Grid Method and Finite Element Analysis

2009

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“…When n = 6 bits, and U = 0:5, the corresponding sensitivity is 3:8 • , which is nearly equal to 1/100 fringe. It has been demonstrated that this technique can provide a displacement resolution of 26 nm given the proper equipment [7]. It can highly improve the accuracy of the measurement and enlarge the application area of the moirÃ e method.…”

Section: Sensitivity Analysis For Sem Moirã E Phase Shifting Techniquementioning

confidence: 98%

“…It is especially useful for measurements of microscopic deformation and has been proved to be a reliable technique. Kishimoto [6], Dally and Read [7] used an electron beam to write ÿne grating with 100 nm spacing on the substrate surface, and to measure micro-deformation of objects.…”

Section: Introductionmentioning

confidence: 99%

Phase shifting SEM moiré method

Xie¹,

Shang²,

Dai³

et al. 2004

Optics & Laser Technology

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“…In 1990s, Read et al [4] grating to generate the moire´patterns. Recently, Xie and his associates [5][6][7][8] adopted the atomic force microscope (AFM) moire´method to measure the thermal deformation of electronic packages.…”

Section: Introductionmentioning

confidence: 99%