Phase shifting SEM moiré method

Xie, Huimin; Shang, Hongjing; Dai, Fulong; Li, Biao; Xing, Yongming

doi:10.1016/j.optlastec.2003.09.012

Cited by 32 publications

(16 citation statements)

References 7 publications

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“…The periodic signal processed by the phase shifting algorithm can be moire´fringes [6,16,17]. This allows to have a displacement value for each pixel of the recorded image (obtained using scanning probe microscopy) and can thus be a more quantitative extension of the traditional moire´exposed in Section 2.1.1.…”

Section: Semi-global Detection By Fast Fourier Transformmentioning

confidence: 99%

On the realization of microscopic grids for local strain measurement by direct interferometric photolithography

Moulart

Rotinat

Pierron

et al. 2007

Optics and Lasers in Engineering

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In order to extend the application range of the so-called ''grid method'' to the micron scale and thus quantitatively characterize the micromechanical behavior of metallic alloys, we report in this paper on the optimization of microscopic 2D gratings with pitches ranging from 1 to 10 mm. After an overview of the state of the art on full-field kinematic measurements at the micron scale, the direct interferometric photolithography technique, used to produce such gratings, is introduced. The shape of the gratings has been characterized using an atomic force microscope and compared with the theoretical profiles. An optimization of the parameters involved in the marking process is then presented. One of the goals lies in the measurement of displacement fields using spatial phase-shifting concept which is briefly recalled. This optimization is achieved for two different optical techniques used to observe the grids namely optical microscopy and white light confocal interferometry. Finally, a first evaluation of the performance of the measurement technique is given and discussed.

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Section: Semi-global Detection By Fast Fourier Transformmentioning

confidence: 99%

On the realization of microscopic grids for local strain measurement by direct interferometric photolithography

Moulart

Rotinat

Pierron

et al. 2007

Optics and Lasers in Engineering

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“…The compact tensile tester is specially designed for in situ micro-tensile testing, which is matched with the stage of the SEM. SEM moiré is a high sensitivity full field deformation measurement method [8,9], which can not only obtain the average strain in the gage section but also the local strain at a specific region like the strain around the defects like crack, hole or interface [10][11][12][13].…”

Section: Introductionmentioning

confidence: 99%

A measuring system for mechanical characterization of thin films based on a compactin situmicro-tensile tester and SEM moiré method

Li¹,

Tang²,

Xie³

et al. 2013

J. Micromech. Microeng.

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A measuring system for mechanical characterization of thin films based on a compact in situ micro-tensile tester and scanning electron microscope (SEM) moiré method is proposed. The load is exerted by the tensile tester and the full field strain is measured by SEM moiré method. The configuration of the tensile tester and the principle of SEM moiré method are introduced. In the tensile tester, a lever structure is designed to amplify the displacement imposed by lead-zirconate-titanate (PZT) actuator. The SEM moiré method is applied to measure the strain of the thin film, including both the average strain in the gage section and the local strain distribution at a specific region. As an application, the measuring system is applied to characterize the mechanical property of the free-standing aluminum thin film. The experimental results demonstrate the feasibility of the system and its good application potential for mechanical behavior analysis of film-like materials.

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“…Optical measurement systems are also suitable for harsh monitorization because they are non-contact and full-field techniques. This is the case of Moiré Interferometry, which is used for many optoelectronic applications as displacement measurements (Wronkowski L., 1995), evaluation of microelectronics devices deformation (Xie H. et al, 2004), optical communications (Chen L. et al, 2000), strain measurements with Fiber Bragg Grattings, FBGs, and spectrography (Kong S. H. et al, 2001). In this context, it must be noted that the recent nuclear disaster in Fukushima, Japan, confirms the need of tighter security measures be done within harsh environments (which includes the automobiles) in order to increase both the safety of people and the reliability of vehicles' parts.…”

Section: Introductionmentioning

confidence: 99%