Scanning ESCA: A new dimension for electron spectroscopy

Hovland, C. T.

doi:10.1063/1.89364

Cited by 36 publications

(7 citation statements)

References 2 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The gold wires were not cleaned in advance of the measurements. This explains the rather poor signal to background ratio of (2) (2) As a rough estimate the diameter in x-direction appears to be 0.3 mm and in y-direction it appears to be 0.5 mm. The image shown in Fig.…”

Section: Y-directionmentioning

confidence: 83%

Imaging XPS—a new technique. 2—Experimental verification

Gurker

Ebel

et al. 1987

Surface & Interface Analysis

View full text Add to dashboard Cite

The XPS image is obtained by the dissection of the surface area of interest into a series of adjacent narrow strips. The width of the entrance slit system of the energy analyzer gives the strip width and a translational movement of the specimen makes it possible to investigate the total number of strips step by step. By means of the double focusing properties of the spherical analyzer the energy spectrum from each point (spot) of the strip area under observation is available on the detector focal plane. Specific photoelectron lines are selected by a suitable choice of the sphere voltages. A position sensitive electron detector together with a computer is used to collect and store these spectra simultaneously in the course of one measurement. The net count rate is evaluated afterwards. Each spot of the strip is represented by its corresponding value of the net count rate and the series of values is stored in a computer memory. At the end of collection of all the strip information the image is put together strip by strip. To date a resolution of 0.3 mm has been realised and the time of data collection for an area of 10 X 10 mm2 is about one hour. The corresponding time of measurement with our imaging method is just a few minutes as one needs only the elemental distribution of an element along a single line as in an electron micronalyzer with a line scan.

show abstract

Section: Y-directionmentioning

confidence: 83%

Imaging XPS—a new technique. 2—Experimental verification

Gurker

Ebel

et al. 1987

Surface & Interface Analysis

View full text Add to dashboard Cite

show abstract

“…By retracting the sample in PEEM and utilizing a second re-focusing mirror downstream, a near 1:1 image of the intermediate focus is available for the operation of a variety of exchangeable endstations (Flechsig et al, 2010;Le Guyader et al, 2012). During measurements, we used an unfocused beam to fully illuminate the FZP with the possibility of inserting a pinhole into the PEEM to obtain a well defined secondary source (Hovland, 1977). For the present experiments, we used horizontally, linearly polarized X-rays.…”

Section: X-ray Source Sim Beamlinementioning

confidence: 99%

“…Our instrument adopts a transmission geometry whereby the photon source and the electron detector are positioned at opposite sides of the sample. XPS in transmission geometry was also reported by Hovland (1977) in a scanning Electron Spectroscopy for Chemical Analysis (ESCA) instrument, achieving resolutions better than 20 mm (Hovland, 1977). The experiments consisted of creating a spatially localized Al K source by bombarding a thin aluminium foil with a focused scanning electron beam.…”

Section: Introductionmentioning

confidence: 99%

Design and performance of a new setup for spatially resolved transmission X-ray photoelectron spectroscopy at the Swiss Light Source

Roy

Raabe

Schifferle

et al. 2019

J Synchrotron Radiat

View full text Add to dashboard Cite

The successful design, installation and operation of a high spatial resolution X-ray photoelectron spectrometer at the Swiss Light Source is presented. In this instrument, a Fresnel zone plate is used to focus an X-ray beam onto the sample and an electron analyzer positioned at 45° with respect to the incoming beam direction is used to collect photoelectrons from the backside of the sample. By raster scanning the sample, transmitted current, X-ray absorption and X-ray photoemission maps can be simultaneously acquired. This work demonstrates that chemical information can be extracted with micrometre resolution; the results suggest that a spatial resolution better than 100 nm can be achieved with this approach in future. This kind of photoelectron spectromicroscope will allow in situ measurements with high spatial resolution also under ambient pressure conditions (in the millibar range). Element-specific X-ray photoemission maps can be obtained before and while exposing the sample to gas/gas mixtures to show morphological and chemical changes of the surface.

show abstract

“…To the best of our knowledge, however, experimental data are exceedingly scarce and at best qualitative. 5 In itself this lack of interest is logical because, traditionally, mostly 3-5 keV electron beams were used for excitation and these are inefficient for the creation of fluorescence radiation. In addition, most spectrometers for Auger analysis employ a cylindrical mirror analyser (CMA) with a constant energy resolution of E/E D 0.6% or worse.…”

Section: Introductionmentioning

confidence: 99%

Fluorescence-based photoelectron features in Auger spectra

Zalm

Toussaint

Crombeen

2000

Surf. Interface Anal.

View full text Add to dashboard Cite

The use of energetic (≥10 keV) electron beams in Auger electron spectroscopy is becoming more and more standard practice because of their superior focusability and an accompanying reduction in charging problems when inspecting thin (<1 µm) insulating layers on conductive substrates. Such beams, however, have a much greater probability to excite (x‐ray) fluorescence, which, in turn, may liberate characteristic photoelectrons. The occurrence of thus‐formed spurious peaks in Auger spectra is not generally acknowledged as a possible or probable artefact that may lead to erroneous assignments. A series of measurements has been made, mainly on silicon technology‐based materials, to establish the importance of this phenomenon. From an analysis of the data, a crude estimate of the occurrence probability and magnitude of fluorescence‐induced photoelectron excitation can be given. Copyright © 2000 John Wiley & Sons, Ltd.

show abstract

Scanning ESCA: A new dimension for electron spectroscopy

Cited by 36 publications

References 2 publications

Imaging XPS—a new technique. 2—Experimental verification

Imaging XPS—a new technique. 2—Experimental verification

Design and performance of a new setup for spatially resolved transmission X-ray photoelectron spectroscopy at the Swiss Light Source

Fluorescence-based photoelectron features in Auger spectra

Contact Info

Product

Resources

About