Optical Interference Coatings 2010
DOI: 10.1364/oic.2010.fa10
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Scandium oxide thin films deposited by dual ion beam sputtering for high-power laser applications

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Cited by 7 publications
(8 citation statements)
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“…In order to reduce test errors, the peak positions of elements were calibrated from the hydrocarbon contamination using the C 1s peak at 284.6 eV, which is usually used as standard peak position in XPS spectra. All Sc 2 O 3 thin films were treated by Ar + ions bombardment in order to eliminate contributions of surface contamination by organic compounds and atmospheric oxidation [22].…”
Section: Film Characterizationmentioning
confidence: 99%
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“…In order to reduce test errors, the peak positions of elements were calibrated from the hydrocarbon contamination using the C 1s peak at 284.6 eV, which is usually used as standard peak position in XPS spectra. All Sc 2 O 3 thin films were treated by Ar + ions bombardment in order to eliminate contributions of surface contamination by organic compounds and atmospheric oxidation [22].…”
Section: Film Characterizationmentioning
confidence: 99%
“…In this case, oxygen defects will be formed in films. Krous et al [22] indicated that there are oxygen defects in Sc 2 O 3 films deposited by IBS. Langston et al [3] shown that a correlation exists between the oxygen interstitials in Sc 2 O 3 films and optical absorption in the films.…”
Section: Introductionmentioning
confidence: 99%
“…To enhance the thermal stability and photocatalytic action, metal oxides such as ZnO 2 , SiO 2 , La 2 O 3 , etc., have also been utilized [ 14 , 15 ]. Moreover, the distinctive features of zirconia, such as the high refractive index, broad optical band gap, low absorption, and dispersion in the visible and near-infrared spectrum areas [ 22 , 23 ] are appealing. Previously, it was observed that adding ZrO 2 to TiO 2 improved the phase stability, surface area and ultimately photocatalytic effects [ 24 , 25 , 26 ].…”
Section: Introductionmentioning
confidence: 99%
“…6,23,24 However, the published sub-picosecond (ps) LIDT results for Sc 2 O 3 or Y 2 O 3 films, indicate that sesquioxides might be good alternatives for HfO 2 . 11,[25][26][27] Especially Sc 2 O 3 , which is a promising high-refractive-index material that exhibits slightly larger optical bandgap (5.7 eV) 28 than HfO 2 (5.55 eV). 29,30 In fact, electron-beam-deposited Sc 2 O 3 and Y 2 O 3 thin films, tested at 500 fs and 1030 nm by a single shot and 100 shots at 10 Hz repetition rate, showed LIDTs comparable to that of HfO 2 .…”
Section: Introductionmentioning
confidence: 99%