Leakage current was investigated for lead zirconate titanate (PZT) thin films on platinum (Pt) and ruthenium oxide (RuO, ) electrodes. for both PZT capacitors. nique was also suggested which can measure fatigue and time dependent dielectric breakdown (TDDB) simultaneously in a short period of time. longer breakdown lifetime than those on Pt electrodes under alternating voltage stresses.Schottky emission was observed An accelerated unified test tech-PZT films on RuO, electrodes show